Substrate Processing Sensor Correlation Plots for Temporal Change Analysis
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Solution Overview
Problem
Conventional correlation graphs for substrate processing apparatuses fail to visualize temporal changes in sensor values, requiring significant manual effort to analyze temporal correlations between multiple sensor values.
Innovation Solution
Classify sensor data based on attribute information affecting temporal changes and display plots in different modes on a correlation graph for each classification, allowing visualization and easy analysis of temporal changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If conventional correlation graphs are used to display sensor values, then the graph structure is simple, but temporal changes in sensor values cannot be visualized and manual analysis effort increases
Solution Approach 1:
The patent segments sensor data by classifying it according to attribute information (such as time periods, operational states, or process conditions). This segmentation allows temporal changes to be visualized by displaying plots in different modes (e.g., different colors, markers, or transparency levels) for each classification category, enabling observers to easily distinguish and analyze temporal patterns without manual intervention.
2Loss of information
If sensor data is classified and displayed in different modes, then temporal changes become visualizable, but the display complexity increases
Solution Approach 1:
The patent applies local quality by assigning different display modes (such as color, shape, or transparency properties) to specific classifications of sensor data based on their attribute information. This allows the display system to maintain overall simplicity while introducing targeted visual variations only where needed to represent temporal changes, avoiding unnecessary complexity across the entire display system.
Data Source
AI summary
Provided is an information processing apparatus including an acquisition unit that acquires sensor data including a plurality of sensor values measured by a substrate processing apparatus and attribute information that affects a temporal change in the substrate processing apparatus, a classification unit that classifies the sensor data based on the attribute information, and a display unit that displays a plot corresponding to the sensor data in a different mode for each classification, on a correlation graph between the plurality of sensor values.