Sensor Data Analysis System for Substrate Processing
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Solution Overview
Problem
In substrate processing apparatuses with numerous sensors, the existing data checking methods are inefficient due to the large number of data points generated during short sampling periods, making it difficult to verify sensor data accurately and quickly.
Innovation Solution
A processing system that includes a first and second statistical operator to divide and perform statistical operations on sensor data from a target and comparative apparatus, respectively, and a calculator to calculate difference values between the two, with a display controller showing these differences in a graph for each processing division, improving data checking efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If data checking is performed using a general method with short sampling periods, then measurement precision is improved, but the number of data points becomes enormous making data checking inefficient
Solution Approach 1:
The patent segments the enormous sensor data into groups based on processing divisions (process steps). The statistical operator performs statistical operations on each group separately, transforming an overwhelming single-task data checking problem into multiple manageable sub-tasks organized by processing stage.
Solution Approach 2:
The patent replaces manual or exhaustive mechanical data checking with automated statistical operation. The statistical operator automatically computes statistical values (mean, standard deviation, etc.) for each group of sensor data, substituting time-consuming manual inspection with efficient computational processing.
2Measurement precision
If statistical operations are performed on all sensor data, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The system segments sensor data by processing divisions and applies statistical operations only to each segmented group rather than all data at once. This reduces computational complexity while maintaining verification accuracy through structured organization of the processing workload.
Solution Approach 2:
The statistical operator is designed as a universal processing component that handles multiple sensor types and processing divisions through a single unified mechanism. This multi-functional design reduces overall system complexity by avoiding the need for separate processing logic for each sensor or process step.
Data Source
AI summary
A processing system includes: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph.