Pressure Sensor Diaphragm Recesses for Alignment Tolerance
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Solution Overview
Problem
Pressure sensor elements face instability in pressure sensitivity due to alignment errors between the diaphragm and the holding member, limiting the accuracy and yield of pressure measurements.
Innovation Solution
The introduction of recesses on the end surface of the holding member, which are cut out parts of the inner circumference, allows strain resistance gauges to be positioned near these recesses, expanding the region where stress is generated and reducing sensitivity loss from misalignment without requiring improved alignment accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the strain resistance gauges are positioned near the joint edge of the holding member, then the pressure sensitivity is maximized, but the measurement stability deteriorates due to alignment errors
Solution Approach 1:
The patent applies local quality by creating a specific region with different properties - the stress concentration region is formed locally near the joint edge where the holding member joins the diaphragm. This region has concentrated stress characteristics that are localized rather than distributed, allowing the strain resistance gauge to be positioned in an area with stable stress characteristics even when alignment varies
Solution Approach 2:
The stress concentration region acts as an intermediary between the joint edge and the strain resistance gauge. Instead of placing the gauge directly at the joint edge where alignment errors cause instability, the stress concentration region serves as a buffer zone that provides stable stress characteristics while still being close enough to capture the necessary deformation signal
2Reliability
If the alignment accuracy between the diaphragm and holding member is increased, then the measurement stability improves, but the manufacturing complexity increases
Solution Approach 1:
The structure serves itself by using the geometric configuration of the holding member and diaphragm joint to automatically create the stress concentration region. The stress concentration arises naturally from the joint geometry and loading conditions, without requiring external adjustment or complex alignment procedures. The strain resistance gauge simply needs to be positioned in this self-formed region
Solution Approach 2:
The patent changes the stress distribution parameter by creating a stress concentration region with specific geometric characteristics. By controlling the shape and position of this region through the holding member design, the stress characteristics are optimized to provide stability without requiring high alignment accuracy. The stress concentration factor and distribution pattern are modified through the geometric parameters of the joint structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration stabilizes pressure sensitivity by dispersing stress and maintaining sensitivity even with misalignment, enhancing the yield of pressure sensor elements without the need for precise alignment between the diaphragm and the holding member.
Implementation Method 1
strain resistance gauges 130a, 130b, 130c, and 130d formed on a first surface 110a of the diaphragm 110... elements that change in resistance values according to the strain or stress that is generated on the first surface 110a when the diaphragm 110 is deformed
Data Source
AI summary
To provide a pressure sensor element and a pressure sensor that have stable pressure sensitivity without the need for improving the accuracy of alignment between a diaphragm and a holding member, a pressure sensor element includes a thin plate diaphragm, a holding member that holds the diaphragm, and one or more strain resistance gauges that are provided on a first surface of the diaphragm and which change in resistance values according to deformation of the diaphragm, in which the holding member has recesses that, formed on an annular first end surface facing the first surface of the diaphragm, cut out parts of an inner circumference of the first end surface, and the strain resistance gauges are disposed near the regions corresponding to the recesses on the first surface of the diaphragm.