Glass Sensor Electrodes With Post-Assembly TGV Metallization

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Solution Overview

Problem

Conventional methods for manufacturing electrochemical sensors are expensive and complex due to the precision alignment requirements of metalized layers, which limits the flexibility and efficiency of electrode fabrication and device assembly.

Innovation Solution

A method for forming a glass electrochemical sensor that eliminates the need for precision alignment of metalized layers by using through glass vias (TGVs) and bottom-up plating to metallize the sensor components post-assembly, allowing for simpler and more reliable electrical connections and increased density of conducting material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If precision alignment of metalized layers is used in conventional electrochemical sensor manufacturing, then electrical connection reliability is improved, but manufacturing complexity and cost increase

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Instead of aligning metalized layers during assembly, the patent inverts the approach by forming through-glass vias (TGVs) through the glass substrate first, then metallizing them after assembly. This eliminates the precision alignment requirement for metalized layers while maintaining electrical connection reliability, directly resolving the technical contradiction between reliability and manufacturing complexity

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent performs preliminary actions by forming TGVs through the glass substrate before final assembly, and then metallizing the TGVs after assembly. This preliminary via formation followed by post-assembly metallization allows for simpler alignment during assembly while ensuring reliable electrical connections, addressing both the reliability and complexity concerns

Inventive Principle:
Principle #10Preliminary action

2Reliability

If precision alignment of metalized layers is used in conventional electrochemical sensor manufacturing, then electrical connection reliability is improved, but production yield decreases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidproduction yield
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent inverts the conventional sequence by forming TGVs first, assembling the sensor, and then metallizing the TGVs. This inversion eliminates precision alignment requirements for metalized layers, thereby increasing production yield while maintaining electrical connection reliability through the TGV structure

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent segments the manufacturing process into distinct stages: TGV formation, assembly, and post-assembly metallization. This segmentation allows each stage to be optimized independently, with the metallization stage no longer requiring precision alignment, thus improving production yield while ensuring reliable electrical connections

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If multiple electrode materials are used in a single sensor, then sensing sensitivity and versatility are improved, but manufacturing complexity increases

Engineering Contradiction:
Improvesensing versatilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent performs preliminary TGV formation and assembly before metallization, allowing different electrode materials to be deposited in different TGVs during a single post-assembly metallization process. This preliminary structuring enables multi-material electrodes without requiring separate alignment processes for each material, thus improving sensing versatility while keeping manufacturing complexity manageable

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The TGV structure serves as a universal platform that can accommodate multiple different electrode materials (e.g., gold, platinum, carbon) in different vias. This universal via structure enables the sensor to detect multiple different analytes simultaneously, improving sensing versatility without proportionally increasing manufacturing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces manufacturing complexity and cost, increases the yield of sensor production, and enables the use of multiple electrode materials within a single sensor, enhancing sensitivity and flexibility in device fabrication.

Implementation Method 1

bottom up plating to metallize the sensor components post-assembly

Methodology Applied
Scientific EffectBottom-up plating: Electroplating

Data Source

PatentUS11846597B2Methods for making electrodes and providing electrical connections in sensors
Publication Date: 2023.12.19 CORNING INC
  • US11846597B2 patent drawing
  • US11846597B2 patent drawing
  • US11846597B2 patent drawing

AI summary

A method of forming a sensor, such as a glass electrochemical sensor, is described. In some examples, the method may include forming a plurality of apertures in a glass substrate; forming a sensor body comprising the glass substrate and at least one glass sensor component, wherein one or more apertures of the glass substrate are aligned with the at least one glass sensor component to form an outer contact aperture; filling the outer contact aperture in the sensor body with a first conducting material to form an outer contact through glass via (TGV); and forming an electrode on the glass substrate adjacent at least one of the apertures of the plurality of apertures.