Sensor Fault Diagnosis via Electrostatic Leakage Extraction

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Solution Overview

Problem

Existing physical quantity measurement devices face challenges in fault diagnosis due to individual variations in sensor elements, requiring complex circuits and trimming technologies, which hinder miniaturization and increase costs, and struggle to accurately diagnose faults without affecting the sensor's operation.

Innovation Solution

A physical quantity measurement device incorporating a fault diagnosis circuit with an electrostatic leakage component extraction circuit that utilizes the coupling capacitance between drive and detection electrodes to extract and diagnose faults, allowing for more accurate and simplified fault detection without the need for vibration leakage components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If vibration leakage component is used for fault diagnosis, then fault diagnosis can be performed, but determination accuracy degrades due to individual variation of sensor element

Engineering Contradiction:
Improvefault diagnosis capabilityVSAvoiddetermination accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The invention extracts the electrostatic leakage component specifically from the detection signal using a dedicated extraction circuit. This separates the fault diagnosis function from the main detection function, allowing accurate extraction of the leakage component that is affected by coupling capacitance between drive and detection electrodes, thereby improving determination accuracy while maintaining fault diagnosis capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention introduces an intermediary electrostatic leakage component that is generated through coupling capacitance between the drive electrode and detection electrode. This intermediary signal serves as a reliable basis for fault diagnosis because its characteristics are determined by the fixed coupling capacitance rather than individual sensor variations, thus resolving the accuracy problem

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If trimming technology is used to extract vibration leakage component, then reliable fault diagnosis can be achieved, but device complexity increases

Engineering Contradiction:
Improvefault diagnosis reliabilityVSAvoidcircuit complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention replaces the mechanical/physical trimming process with an electrical signal processing approach. Instead of physically adjusting or trimming the sensor to extract the leakage component, the system uses an electrostatic leakage component extraction circuit that electronically separates and processes the leakage signal from the detection signal, thereby reducing device complexity while maintaining diagnosis reliability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention uses the electrostatic coupling capacitance between electrodes as an intermediary mechanism to generate a predictable leakage component. This intermediary signal path provides a reliable basis for fault diagnosis without requiring complex trimming circuits or additional hardware, thus achieving reliability with reduced complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If synchronous detection circuit is added to extract vibration leakage component, then fault diagnosis can be performed, but chip size grows

Engineering Contradiction:
Improvefault diagnosis functionVSAvoidchip size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The invention merges the fault diagnosis function with the existing detection signal processing path. The electrostatic leakage component extraction circuit processes the same detection signal that is already being amplified and processed for normal operation, combining multiple functions into a unified signal path. This integration approach enables fault diagnosis without requiring separate dedicated circuits, thereby preventing chip size growth

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention extracts the electrostatic leakage component directly from the detection signal using a dedicated extraction circuit that operates within the existing signal processing architecture. This extraction approach obtains the necessary fault diagnosis information from the available detection signal without requiring additional synchronous detection circuits or separate signal paths, thus avoiding increase in chip size

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances fault diagnosis accuracy, reduces circuit complexity, and enables miniaturization by using electrostatic leakage components, improving determination accuracy and reducing temperature variation effects, thus ensuring reliable operation across a broad temperature range.

Implementation Method 1

a sensor element having a drive electrode and a detection electrode, and provided with a coupling capacitance formed between the drive electrode and the detection electrode

Methodology Applied
Scientific EffectCoupling capacitance: Capacitance

Data Source

PatentUS10746809B2Physical quantity measurement device, electronic apparatus, and vehicle
Publication Date: 2020.08.18 SEIKO EPSON CORP
  • US10746809B2 patent drawing
  • US10746809B2 patent drawing
  • US10746809B2 patent drawing

AI summary

A physical quantity measurement device includes a sensor element having a coupling capacitance formed between a drive electrode and a detection electrode, and a circuit device having a drive circuit adapted to supply a drive signal to the drive electrode, a detection circuit adapted to detect physical quantity information corresponding to a physical quantity based on a detection signal from the detection electrode, and a fault diagnosis circuit, and the fault diagnosis circuit has an electrostatic leakage component extraction circuit adapted to extract an electrostatic leakage component due to the coupling capacitance from one of the detection signal and an amplified signal of the detection signal, and performs a fault diagnosis based on the electrostatic leakage component extracted.