Cross-Tool Process Control Using Sensor Feedback Replication

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Solution Overview

Problem

Manufacturing tools across different types and facilities produce varying products due to environmental factors, tool variations, and sensor outputs, leading to inconsistent product quality despite calibration efforts.

Innovation Solution

A process control device system that communicates using cellular or WLAN protocols to collect data from sensors on one manufacturing tool, identify attributes, and send commands to another tool to replicate settings, ensuring consistent output across different manufacturing tools and facilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If tools are programmed and calibrated to perform the same functions, then manufacturing consistency is improved, but product variation still occurs due to environmental factors and sensor outputs

Engineering Contradiction:
Improveproduct consistencyVSAvoidoutput stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The system collects sensor data from manufacturing tools, identifies attributes in the data, and uses this feedback to determine and apply settings that replicate output attributes across different tools, thereby maintaining consistency despite environmental variations

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts manufacturing parameters by identifying attributes from sensor data and determining optimal settings to replicate desired output attributes, allowing adaptation to environmental factors while maintaining product consistency

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If different manufacturing tools are used across facilities, then manufacturing flexibility is improved, but product variation increases due to tool differences

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidproduct uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The system collects data from a first manufacturing tool and uses processing resources to identify attributes and determine settings that replicate the output attributes on a second manufacturing tool, effectively creating a digital copy of the optimal configuration across different tools and facilities

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The system is designed to work across different types of manufacturing tools and facilities by collecting data from various sensors, identifying attributes universally, and applying determined settings to replicate output attributes across diverse manufacturing environments

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If sensor data is collected and analyzed to determine settings, then product quality control is improved, but system complexity increases

Engineering Contradiction:
Improvequality controlVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system divides the complex task of quality control into separate functional components: data collection from sensors, attribute identification through processing resources, determination of settings, and application to manufacturing tools, making the overall system more manageable and implementable

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11385618B2Process control device in manufacturing
Publication Date: 2022.07.12 MICRON TECHNOLOGY INC
  • US11385618B2 patent drawing
  • US11385618B2 patent drawing
  • US11385618B2 patent drawing

AI summary

Methods, devices, and systems related to process control in manufacturing are described. In an example, a method can include receiving data from a first process control device affixed to a first manufacturing tool of a first type, identifying one or more attributes of the data via a second processing resource of a second process control device affixed to a second manufacturing tool of a second type different from the first type, determining one or more settings for the second manufacturing tool via the second processing resource in response to identifying the one or more attributes of the data, and sending a command including the one or more settings to the second manufacturing tool from the second process control device.