Sensor Fusion for Bubble-Safe Chemical Reservoir Level Detection
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Solution Overview
Problem
In the semiconductor and related industries, ultrasonic level-sensors often trigger false overflow alarms due to fluid turbulence causing bubbles and foam in chemical reservoirs, leading to costly chemical waste and production losses, as they cannot accurately differentiate between liquid levels and bubbles/foam, and are affected by noise from vibrational systems.
Innovation Solution
A system combining a liquid-level sensor, a mass-detection device, and a processor to determine the actual volume of liquid in a reservoir, using a showerhead to reduce or eliminate bubbles and foam, and an adaptive neuro-fuzzy interface system (ANFIS) for accurate level detection and noise filtering, forming an in-situ, closed-loop bubble and foam detection and reduction system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If ultrasonic level-sensors are used to detect liquid levels, then liquid level detection is enabled, but false overflow alarms are triggered due to bubbles and foam
Solution Approach 1:
The patent combines multiple sensing modalities (ultrasonic level sensing, weight sensing, and optical detection) into a unified measurement system. The ultrasonic sensor detects liquid level, the weight sensor measures total mass, and the optical sensor identifies bubbles and foam. By merging these complementary sensing approaches, the system achieves reliable liquid level measurement that is not susceptible to false readings from bubbles or foam, thereby resolving the contradiction between measurement capability and reliability.
Solution Approach 2:
The patent introduces a microprocessor-based control system as an intermediary that processes signals from multiple sensors and applies algorithms to distinguish between actual liquid level changes and false readings caused by bubbles or foam. This intermediary intelligence layer analyzes data from ultrasonic, weight, and optical sensors to make accurate overflow determination, preventing false alarms while maintaining reliable detection capability.
2Productivity
If fluid turbulence is increased to improve mixing, then mixing efficiency is improved, but bubbles and foam are generated
Solution Approach 1:
The patent converts the harmful effect of bubbles and foam (generated during turbulent mixing) into a detectable signal. The optical sensor specifically detects the presence and characteristics of bubbles and foam, and the control system uses this information to adjust mixing parameters or activate anti-foam mechanisms. By detecting and responding to the harmful byproduct of efficient mixing, the system maintains high mixing efficiency while managing the unwanted bubble and foam generation.
3Reliability
If vibration isolation is increased to reduce noise, then sensor reliability is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical vibration isolation structures with electronic signal processing solutions. The microprocessor-based control system uses algorithms to filter and analyze sensor signals, distinguishing between genuine liquid level changes and vibrations caused by pumps or other mechanical components. This substitution of mechanical isolation with intelligent signal processing achieves reliable sensor readings without adding complex mechanical isolation structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents false overflow alarms, reduces chemical waste, and maintains accurate liquid level measurements by distinguishing between liquid and bubbles/foam, thereby minimizing production losses and improving process reliability.
Implementation Method 1
a mass-detection device for determining a mass of the fluid reservoir and liquid contained therein
Implementation Method 2
A showerhead is coupled to the processor and positioned above the fluid reservoir. The showerhead is activated by the processor when the measured volume of liquid determined by the liquid-level sensor exceeds the actual volume of the liquid as determined by the mass-detection device by a predetermined amount
Data Source
AI summary
In one embodiment, the disclosed apparatus is an in-situ, closed-loop bubble and foam detection and reduction system that includes a liquid-level sensor to determine a volume of a liquid in a fluid reservoir, a mass-detection device to determine a mass of the fluid reservoir and any liquid contained within the fluid reservoir, a processor electrically coupled to the liquid-level sensor and the mass-detection device to determine an actual volume of the liquid within the fluid reservoir, and a showerhead coupled to the processor and positioned above the fluid reservoir. The showerhead is activated by the processor when a volume of the liquid determined by the liquid-level sensor exceeds the actual volume of the liquid by a predetermined amount. Other apparatuses and methods are disclosed.