Sensor-Integrated Gas Flow Valve for Wear and Leak Control
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Solution Overview
Problem
Conventional gas flow control valves in manufacturing systems, such as those used in semiconductor fabrication, suffer from poor precision, repeatability, reliability, and cleanliness due to wear and particle contamination, which leads to mechanical and electrical hysteresis, gas leakage, and contamination of substrates.
Innovation Solution
A gas flow valve with integrated position and force sensors that measure the plunger's position and the force exerted on the sealing surface, allowing for precise control of gas flow and detection of valve wear and leaks. Additionally, a particle trap and in-situ cleaning mechanism are included to maintain valve cleanliness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional gas flow control valves are used, then gas flow control is provided, but precision and repeatability deteriorate due to wear and particle contamination
Solution Approach 1:
The patent combines multiple sensing functions (position sensing and force sensing) into a single valve assembly, integrating them with the plunger mechanism. This merging allows comprehensive monitoring of valve state without adding separate external monitoring systems, thereby improving precision while managing complexity through functional integration.
Solution Approach 2:
The patent implements feedback mechanisms using position sensors and force sensors that continuously monitor plunger position and sealing force. This feedback enables real-time adjustments to maintain precise gas flow control despite wear or contamination, directly addressing the precision deterioration problem while using established sensing technologies to manage complexity.
2Productivity
If gas flow valve operates continuously, then productivity is improved, but wear and leakage increase causing unscheduled downtime
Solution Approach 1:
The patent enables the valve to self-monitor its own condition through integrated position and force sensors that track plunger position and sealing force. This self-service capability allows the valve to detect wear and potential failures autonomously, enabling proactive maintenance that sustains high productivity while preventing unscheduled downtime from unexpected failures.
Solution Approach 2:
The patent implements preliminary detection of wear and leakage conditions through continuous sensor monitoring before actual failures occur. By detecting degradation trends early, the system can schedule maintenance proactively, maintaining high productivity while preventing reliability deterioration from unchecked wear and leakage.
3Productivity
If particles are present in gas flow, then valve operation continues, but wear and contamination worsen
Solution Approach 1:
The patent replaces purely mechanical valve operation with a sensor-monitored system that uses position and force sensing to detect particle-induced wear and contamination effects. This substitution enables continuous operation while mechanically detecting harmful particle effects, allowing productivity maintenance through early detection rather than mechanical failure.
4Reliability
If force on sealing surface is increased to prevent leakage, then gas leakage is reduced, but wear on sealing surface increases
Solution Approach 1:
The patent uses force sensors to provide feedback on the actual sealing force applied to the sealing surface. This feedback enables precise control of plunger force, applying only the minimum necessary force to achieve adequate sealing performance. This prevents excessive force that would accelerate wear, thereby extending sealing surface life while maintaining reliable sealing.
Data Source
AI summary
Certain embodiments of the present disclosure relate to a gas flow valve. The gas flow valve includes a housing configured to receive a flow of gas. The gas flow valve further includes a plunger configured to move between a closed position and one or more open positions within the housing. The gas flow valve further includes a position sensor configured to measure a distance associated with a difference in position of the plunger between the closed position and the one or more open position. The gas flow valve further includes a force sensor coupled to the plunger and configured to measure a force exerted by the plunger in the closed position on a sealing surface.