Process Kit Centerfinding Using Sensor Feedback for Stable Placement
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Solution Overview
Problem
Conventional manufacturing systems face challenges in accurately positioning process kits and carriers, leading to potential damage and inefficiencies due to shifting placements during transfer, which can result in substrate defects and increased maintenance costs.
Innovation Solution
The implementation of sensors at manufacturing system stations to detect the shape and center of process kits and carriers on an end effector, allowing for real-time adjustments to the robot arm's process recipe to ensure precise placement at target locations, thereby preventing dislodgment and equipment damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the robot moves the process kit and carrier to the station, then the substrate processing can be performed, but the process kit and carrier may not be accurately positioned, causing substrate damage
Solution Approach 1:
The system performs centerfinding operations before the robot transfers the process kit to the substrate station. Sensors detect the process kit on the end effector and calculate its center position relative to the end effector center, allowing the system to compensate for any placement deviations before critical operations occur
Solution Approach 2:
The system uses sensors to continuously monitor the position of the process kit and carrier on the end effector. The detected center position is fed back to the robot controller, which adjusts the placement parameters to ensure accurate positioning at the substrate station, creating a closed-loop control system
2Manufacturing precision
If conventional positioning methods are used, then the system structure remains simple, but positioning accuracy deteriorates leading to substrate defects
Solution Approach 1:
The system introduces sensors as an intermediary between the robot end effector and the substrate station. These sensors detect the process kit position and provide data to the controller, which then adjusts the robot movement to achieve accurate placement without requiring complex mechanical positioning mechanisms
Solution Approach 2:
The system replaces complex mechanical positioning mechanisms with a sensor-based detection and calculation system. Instead of using precision mechanical guides or alignment mechanisms, the system uses sensors to detect the process kit center and computationally determines the correct placement position, substituting mechanical complexity with sensing and processing
Data Source
AI summary
A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.