Sensor-Guided Nozzle Installation Jig for Reaction Tube Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing nozzle installation methods in semiconductor manufacturing are challenging due to difficulties in checking the state of the upper portion of the nozzle and the time-consuming process of ensuring proper alignment to avoid contact with the boat during setup.
Innovation Solution
A nozzle installation jig is introduced, comprising a frame with a sensor to detect the nozzle's position within the process vessel, allowing for precise alignment and attachment, thereby preventing interference with the boat or wafer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If manual alignment method is used to position the nozzle, then the setup process is simple, but it takes time and is difficult to check the upper portion alignment
Solution Approach 1:
A jig is introduced as an intermediary tool between the operator and the nozzle positioning process. The jig includes a sensor that detects the position of the nozzle relative to the reaction tube, providing accurate alignment information without requiring complex manual measurement procedures. This mediator enables precise positioning while maintaining operational simplicity.
Solution Approach 2:
The patent replaces manual visual inspection and mechanical alignment methods with an automated sensor-based detection system. The sensor electronically detects the nozzle position and provides feedback, substituting the mechanical alignment process with an automated measurement and control system that reduces time and improves precision.
2Manufacturing precision
If the nozzle is positioned closer to the boat to improve film-forming stability, then the film uniformity improves, but the risk of contact and damage increases
Solution Approach 1:
The jig incorporates a sensor that provides real-time feedback on the nozzle position relative to the reaction tube and boat. This feedback mechanism allows the operator to precisely control the nozzle positioning, maintaining the optimal distance for film uniformity while preventing contact with the boat. The sensor data enables continuous monitoring and adjustment to avoid harmful contact.
Solution Approach 2:
The sensor detection system performs preliminary positioning verification before final nozzle installation. By detecting the nozzle position in advance and providing alignment guidance, the system ensures that the nozzle is correctly positioned at the optimal distance from the boat, preventing contact before it can occur during the installation process.
3Measurement precision
If a complex positioning system is used to achieve precise nozzle alignment, then positioning accuracy improves, but the device complexity increases
Solution Approach 1:
The patent uses a relatively simple jig as an intermediary device that incorporates a sensor for position detection. Rather than implementing a complex automated positioning system, the jig serves as a straightforward tool that provides alignment guidance through sensor feedback, achieving precise nozzle positioning without requiring elaborate machinery or complex control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables proper fixation of the nozzle, maintaining film-forming stability, preventing damage, and minimizing particle generation and scratches, while allowing for solo operation in narrow spaces.
Implementation Method 1
a second portion provided on the frame with a sensor configured to detect a position of the nozzle in the process vessel
Data Source
AI summary
Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.