Differential Pressure Sensor Horizontal Channel Venting
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional differential pressure sensors face issues with maintaining unblocked vent holes, which can lead to clogging when mounted on printed circuit boards, affecting the reliability of atmospheric pressure buildup and measurement.
Innovation Solution
A differential pressure sensor device with a multi-layer substrate and a channel system that allows atmospheric pressure to be built up and maintained through a vent hole formed in a dielectric layer parallel to the substrate's main surface, reducing the risk of clogging and eliminating the need for a corresponding through hole in the PCB.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vent hole is formed in the substrate to allow atmospheric pressure buildup, then the pressure sensing function is enabled, but the vent hole may become clogged when mounted on a PCB, reducing reliability
Solution Approach 1:
The channel is repositioned from a vertical through-hole configuration to a horizontal configuration that extends in a plane substantially parallel to the main surface of the substrate. This dimensional change allows the channel to be formed within a specific sub-layer between the top and bottom surfaces, eliminating the need for a through-hole that protrudes downward where it could be blocked by PCB mounting surfaces or solder.
Solution Approach 2:
The substrate is divided into multiple sub-layers, with the channel formed specifically in one of these sub-layers between the top and bottom surfaces. This segmentation allows the channel to be isolated within a specific layer, preventing interaction with external blocking elements while maintaining the venting function.
2Ease of operation
If a through hole is formed in the substrate for venting, then atmospheric pressure can be built up, but it requires a corresponding through hole in the PCB, increasing device complexity and footprint
Solution Approach 1:
The channel is configured to extend horizontally in a plane parallel to the substrate surface rather than vertically through the substrate. This allows the venting function to be achieved without requiring a corresponding through-hole in the PCB, as the channel terminates within the substrate structure itself.
Solution Approach 2:
The multi-layer substrate structure serves multiple functions: it provides mechanical support, creates the pressure sensing cavity, forms the channel for atmospheric pressure buildup, and eliminates the need for additional PCB modifications. This integration reduces overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the reliability of atmospheric pressure buildup and measurement by minimizing the risk of vent hole clogging and reducing the footprint on the printed circuit board, ensuring consistent and accurate pressure sensing.
Implementation Method 1
atmospheric pressure or a reference pressure can be built up in the first cavity by gas entering through the vent hole, the channel and the inlet
Implementation Method 2
a first cavity formed by the MEMS and a second cavity partially formed by the housing, said other layer and the membrane and wherein the first cavity and the second cavity are separated from each other by the membrane
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The present invention relates to a differential pressure sensor device, comprising a substrate, a other layer formed on a main surface of the substrate and a first cavity and a second cavity separated from each other by a membrane. The first cavity is in fluid communication with a channel that is in fluid communication with a vent hole through which air can enter from an environment of the sensor device. The channel extends within the other layer or the substrate in a plane that is substantially parallel to the main surface.