Sensor Apparatus Immobilizing Film Surface Roughness
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Solution Overview
Problem
Existing sensor apparatuses using surface acoustic wave elements suffer from insufficient detection sensitivity and accuracy due to the detection part's surface roughness and oxygen content.
Innovation Solution
The sensor apparatus incorporates an element substrate with an immobilizing film having a smoother surface roughness and lower oxygen content than the element electrode, allowing for effective immobilization of detection components and improved detection sensitivity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a detection part is used with conventional surface acoustic wave elements, then the sensor apparatus can detect specimens, but the detection sensitivity and accuracy are insufficient
Solution Approach 1:
The patent applies local quality by creating a specialized immobilizing film with distinct properties (smoother surface, lower oxygen content) at the detection interface where it contacts the specimen, while the element electrode maintains its conventional properties. This localized modification optimizes the specific function of specimen interaction without compromising the overall sensor structure.
Solution Approach 2:
The patent changes physical and chemical parameters of the immobilizing film surface by controlling surface roughness to be smaller than the element electrode and oxygen content to be lower than the element electrode. These parameter modifications enhance the immobilization of detection components and reduce nonspecific adsorption, thereby improving detection accuracy and sensitivity.
2Object-affected harmful factors
If the surface roughness of the immobilizing film is reduced, then nonspecific adsorption is minimized, but the immobilization of detection components may be affected
Solution Approach 1:
The patent optimizes the surface roughness parameter of the immobilizing film to be smaller than that of the element electrode, which reduces nonspecific adsorption while maintaining effective immobilization of detection components through controlled surface chemistry and oxygen content.
Solution Approach 2:
The immobilizing film is designed as a composite structure with specific material properties (low oxygen content, smooth surface) that combine to achieve both reduced nonspecific adsorption and effective detection component immobilization, resolving the contradiction between these two requirements.
3Measurement precision
If the oxygen content in the immobilizing film is reduced, then detection sensitivity is improved, but the film formation complexity increases
Solution Approach 1:
The patent controls the oxygen content parameter of the immobilizing film to be lower than that of the element electrode by optimizing deposition conditions and material selection. This parameter control enhances detection sensitivity while the film formation process remains integrated into existing sensor manufacturing workflows.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the sensor apparatus to detect specimens with enhanced sensitivity and accuracy by minimizing nonspecific adsorption and ensuring uniform immobilization of detection components.
Implementation Method 1
minimizing nonspecific adsorption and ensuring uniform immobilization of detection components
Implementation Method 2
measuring a change of a surface acoustic wave after propagating along the detection part
Data Source
AI summary
A sensor apparatus according to an embodiment of the present invention includes an element substrate, an element electrode located on an upper surface of the element substrate, an insulating member covering at least a part of the element electrode, and a detection part that includes an immobilizing film located on the upper surface of the element substrate or an upper surface of the insulating member, and performs a detection of a detection object contained in a specimen. A surface roughness of the immobilizing film is smaller than a surface roughness of the element electrode. In a sensor apparatus of other embodiment of the present invention, an amount of oxygen in a surface layer part of the immobilizing film is smaller than an amount of oxygen in a surface layer part of the element electrode.