Sensor-Based Mobile Device Positioning in Semiconductor Fabrication
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Solution Overview
Problem
In semiconductor fabrication, accurately positioning a mobile device relative to a stationary device within a manufacturing environment is challenging due to variations in wafer handling and processing, requiring precise alignment and coordinate offset calculations to ensure effective manufacturing operations.
Innovation Solution
A method and system that utilize a sensor-equipped mobile device to detect a target on a stationary device, calculate position coordinate offset values, and adjust its position to align with the target, allowing for automatic or programmed movement and alignment, incorporating 2D and 3D coordinate systems for precise positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual positioning methods are used to align mobile devices with stationary devices, then operational flexibility is maintained, but positioning precision and alignment accuracy deteriorate
Solution Approach 1:
A sensor serves as an intermediary between the mobile device and stationary device, detecting target features and providing data to an controller that calculates positioning information. This mediator enables precise automatic positioning without requiring complex mechanical alignment systems.
Solution Approach 2:
The patent replaces manual mechanical positioning with an automated system using sensors, cameras, and controllers that optically detect targets and computationally determine position coordinates, eliminating the need for complex mechanical alignment mechanisms.
2Manufacturing precision
If automatic sensor-based positioning is implemented, then positioning precision improves, but device complexity increases
Solution Approach 1:
The sensor system is designed to perform multiple functions: detecting targets, capturing images, calculating position coordinates, and providing feedback for positioning. This multi-functionality reduces the need for separate specialized components, managing system complexity while maintaining high precision.
Solution Approach 2:
The sensor detects target features and provides feedback data to the controller, which calculates positioning information and guides the mobile device's movement. This closed-loop feedback system achieves high alignment accuracy through iterative correction rather than requiring overly complex open-loop positioning mechanisms.
3Measurement precision
If precise coordinate offset calculations are performed, then alignment accuracy improves, but processing time increases
Solution Approach 1:
The system performs preliminary detection of target features and pre-calculates position coordinate offset values before the mobile device needs to be positioned. This advance preparation reduces the time required during actual positioning operations while maintaining calculation accuracy.
Solution Approach 2:
Complex real-time coordinate calculations are replaced with pre-computed offset values stored in memory, which are quickly retrieved and applied during positioning operations. This substitution of computational heavy lifting with stored data reduces processing time while maintaining precision.
Data Source
AI summary
A method for positioning a mobile device relative to a stationary device in a semiconductor manufacturing environment is disclosed. The method includes detecting a target affixed to the stationary device at a target location, wherein the target location corresponds to a location of the target relative to a reference point on the stationary device, determining a first position coordinate offset value based upon detecting the target, and moving the mobile device, using the first position coordinate offset value, relative to train the mobile device to move relative to the stationary device for the stationary device to performing a semiconductor manufacturing operation.