Sensor Structure for Pressure Wave and Ambient Pressure Detection
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Solution Overview
Problem
Conventional sensor structures for sensing pressure waves and ambient pressure face challenges in integrating both functions without compromising sensitivity, as protective layers can hinder the operation of microphones and pressure sensors.
Innovation Solution
A sensor structure comprising a first and second conductive layer forming a chamber with lower pressure than outside, along with pillar structures and spacer layers, allows for simultaneous sensing of pressure waves and ambient pressure by detecting deflections and changes in capacitance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protective resin or epoxy layer is formed over the sensors, then durability and resistance to environmental factors are improved, but the sensitivity of microphones and pressure sensors deteriorates
Solution Approach 1:
The sensor package is segmented into distinct regions: an exposed sensing region where the diaphragm is accessible to pressure waves, and an encapsulated region where other sensors are protected. This segmentation allows the microphone to maintain sensitivity while other components gain protection.
Solution Approach 2:
Different parts of the sensor package have different properties: the microphone region remains exposed with no protective layer to maintain sensitivity, while other sensor regions are encapsulated in protective resin or epoxy for durability. This local differentiation resolves the contradiction between protection and sensitivity.
2Measurement precision
If the diaphragm is exposed to incident pressure waves, then the microphone can detect pressure waves, but the structural integrity and protection of the sensor package deteriorates
Solution Approach 1:
The sensor package structure is divided into exposed and protected zones. The diaphragm and its immediate support structure form an exposed zone for detection, while the bulk of the package contains a protected zone with encapsulated sensors and support structures, balancing detection capability with structural integrity.
Solution Approach 2:
The exposed diaphragm structure is nested within the larger protected sensor package housing. The diaphragm chamber is enclosed by the package structure that provides overall structural integrity, allowing the small exposed region to benefit from the protection of the surrounding encapsulated structure.
3Device complexity
If both microphone and pressure sensor functions are integrated into a single package, then device complexity is reduced, but the manufacturing precision required increases
Solution Approach 1:
The integrated sensor package is fabricated using segmented processing steps that allow different regions to be formed with appropriate precision requirements. The diaphragm chamber, electrode structures, and encapsulation regions are formed in separate stages, enabling standard manufacturing processes to achieve the required overall precision.
Solution Approach 2:
The sensor package structure serves multiple functions simultaneously: it provides structural support, defines the sensing chamber, protects internal components, and enables both microphone and pressure sensing functions. This multi-functionality reduces the need for additional separate components and simplifies the overall device while managing manufacturing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables effective detection of pressure wave magnitude and ambient pressure changes, enhancing the sensitivity and functionality of sensors while maintaining structural integrity.
Implementation Method 1
a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.
Data Source
AI summary
In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.