Sensor Protective Layer Design for Hot Water Resistance
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Solution Overview
Problem
Pressure sensors used in semiconductor manufacturing face challenges with isolator films deforming or delaminating when exposed to hot deionized water between 85° C. and 100° C., leading to corrosion and contamination issues.
Innovation Solution
A sensor design featuring a ceramic material with a chromium adhesion layer and a fluoropolymer isolator film, where the isolator film is bonded to the adhesion layer using thermal lamination or laser welding, and optionally includes vent pathways to prevent delamination and deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a loose fluoropolymer film is used to isolate sensors from liquid chemicals, then sensor protection from corrosion and contamination is achieved, but the film deforms permanently under heat and vacuum exposure
Solution Approach 1:
The patent employs a fluoropolymer isolator film to protect the sensor from chemical exposure. The film is specifically selected and configured to resist permanent deformation under heat and vacuum conditions while maintaining its protective function. This resolves the contradiction by choosing materials and design parameters that simultaneously achieve protection and dimensional stability.
2Strength
If adhesives are used to secure the isolator film to the sensor, then the film is fixed in place, but bubbles or blisters form and delamination occurs during extended exposure to hot deionized water
Solution Approach 1:
The patent removes the adhesive layer from the sensor assembly, eliminating the source of delamination and blistering problems. The isolator film is instead secured through alternative means such as mechanical clamping or integration with the sensor housing, thereby achieving secure attachment without compromising bond integrity during thermal exposure.
Solution Approach 2:
The patent introduces a new intermediate structure or method to secure the isolator film without using adhesives. This could involve a mechanical retention system or a different bonding approach that does not suffer from thermal degradation, thus maintaining attachment strength while preventing delamination in hot water environments.
3Reliability
If the isolator film is exposed to hot deionized water between 85° C. and 100° C. for extended periods, then sensor isolation is maintained, but delamination and deformation occur
Solution Approach 1:
The patent modifies the material parameters of the isolator film and its interface with the sensor to withstand extended exposure to hot deionized water. This includes selecting fluoropolymer compositions with higher thermal stability, optimizing film thickness and structure, and adjusting mechanical retention parameters to prevent delamination and deformation during prolonged thermal exposure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a stable, long-lasting barrier against hot deionized water, preventing visible blisters and delamination for at least 3 weeks, ensuring reliable sensor performance in high-temperature environments.
Implementation Method 1
The adhesion layer may comprise a physical vapor deposition deposited layer
Implementation Method 2
The isolator film may be bonded to the adhesion layer by thermal lamination, such as at a temperature greater than about 300 C for at least about 10 minutes
Implementation Method 3
an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer
Data Source
AI summary
A sensor comprises a sensor layer comprising a ceramic material; an adhesion layer comprising chromium, the adhesion layer adhered to one or more portions of a liquid facing surface of the sensor layer; and an isolator film comprising a polymer, the isolator film overlaying a liquid facing surface of the adhesion layer. The isolator film may be used to protect the sensor from corrosive and high temperature fluids, for example to protect the sensor from long term exposure to hot water between 85° C. and 100° C.