Sensor Retrofit Data Collection for Substrate Processing Tools
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Solution Overview
Problem
Existing substrate processing apparatuses require significant renovation and cost to retrofit additional sensors, limiting the ability to collect diverse sensor data effectively.
Innovation Solution
An information collection device with a power supply unit, input unit, relay unit, and control unit that can be easily attached to a substrate processing apparatus, allowing for the integration of various sensors to collect and relay data independently of the apparatus's control device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If additional sensors are retrofitted to substrate processing apparatuses, then data collection capability is improved, but device complexity and renovation cost increase
Solution Approach 1:
The system is divided into independent functional modules: sensors that detect substrate processing states, an information collection device that gathers and stores data, and a relay device that transmits information. This segmentation allows sensors to be added without complicating the core apparatus structure, as each module operates independently but communicates through standardized interfaces.
Solution Approach 2:
The information collection device and relay device act as intermediaries between the sensors and the substrate processing apparatus control system. These intermediary devices handle data collection, storage, and transmission, preventing direct integration complexity from being introduced into the apparatus itself while still enabling comprehensive sensor data collection.
2Loss of information
If additional sensors are retrofitted to substrate processing apparatuses, then data collection capability is improved, but renovation cost increases
Solution Approach 1:
By segmenting the system into independent sensor modules and data collection devices, the retrofitting process becomes modular and scalable. Organizations can add sensors incrementally based on budget constraints, with each sensor and collection device functioning as a standalone unit that interfaces through standardized protocols, reducing upfront renovation costs.
Solution Approach 2:
The information collection device and relay device are designed with universal interfaces that can accommodate multiple types of sensors and communicate with various substrate processing apparatuses. This multi-functionality reduces the need for custom integration work for each sensor type or apparatus model, thereby lowering overall retrofitting costs.
3Loss of information
If sensors are integrated into the apparatus control device, then data collection is improved, but operational complexity increases
Solution Approach 1:
The system separates sensor data collection and processing functions from the apparatus control device into independent information collection and relay devices. This segmentation allows the apparatus control device to maintain its existing simple operational interface, while the added functionality resides in separate modules that automatically collect and transmit data without requiring operator intervention or complicating the control workflow.
Solution Approach 2:
The information collection device and relay device operate autonomously, automatically detecting sensor data, storing information, and transmitting it to designated systems without requiring manual operation or integration with the apparatus control device. This self-service capability adds data collection functionality while maintaining the simplicity of the original apparatus operation.
Data Source
AI summary
An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatus detected by the sensor, a relay unit that relays transmission of the sensor data; and a control unit that collects the sensor data input by the input unit through the relay unit.