Sensor Element With Segmented Substrate For Fluid Detection
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Solution Overview
Problem
Conventional sensors for detecting specific substances in fluids face challenges in achieving improved detection accuracy.
Innovation Solution
A sensor element design comprising a deformable thin first substrate supported by a thicker second substrate, with projections that concentrate stress on piezoresistive elements, enhancing detection accuracy by increasing resistance changes when the sensitive membrane deforms upon substance adsorption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the substrate is made thinner to improve flexibility and sensitivity, then the detection sensitivity is improved, but the mechanical strength and stability deteriorate
Solution Approach 1:
The substrate is divided into two distinct parts: a thin first substrate that provides flexibility and sensitivity for detection, and a thick second substrate that provides mechanical strength and stability. This segmentation allows each part to fulfill its specific function optimally without compromising the other.
Solution Approach 2:
Different regions of the substrate structure are given different thicknesses and properties. The first substrate region is made thin to enhance sensitivity where the sensitive membrane is located, while the second substrate region is made thick to provide overall mechanical support and stability to the sensor element.
2Measurement precision
If stress is concentrated on the detector to improve detection accuracy, then the measurement precision is improved, but the risk of detector damage increases
Solution Approach 1:
The second substrate is designed with projections that create localized stress concentration points at specific locations where the detectors are positioned. This allows stress to be concentrated precisely where needed for detection while the overall substrate structure maintains adequate strength through its thicker design and projection geometry.
Solution Approach 2:
The projections on the second substrate are pre-designed to concentrate stress in controlled locations before the actual detection process occurs. This preliminary structural design ensures that when the substrate deforms, the stress is automatically directed to the detector locations in a controlled manner, improving detection accuracy while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor element achieves improved detection accuracy by concentrating stress on piezoresistive elements, resulting in greater resistance changes and enhanced sensitivity for detecting substances in fluids.
Implementation Method 1
piezoresistive elements that change in resistance in response to stress applied to the first substrate
Data Source
AI summary
A sensor element comprises: a first substrate; a detector disposed on the first substrate; and a second substrate surrounding the first substrate and supporting the first substrate. The second substrate is thicker than the first substrate. The second substrate has a connection part which is connected to the first substrate and a non-connection part which is not connected to the first substrate. The detector is located in the vicinity of the connection part.