Sensor Station Automating Substrate Data Acquisition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current data acquisition methods for semiconductor manufacturing are cumbersome and insecure, requiring manual handling of sensor wafers and laptops, leading to delayed data utilization and security risks, especially when transferring data from substrate-type sensors to substrate treating systems.
Innovation Solution
A sensor station with a power source unit, processing unit, and communication unit that enables real-time data transmission from substrate-type sensors to a server within the substrate treating system, even across different communication networks, using wireless communication and heterogeneous network mediation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual data acquisition method using sensor wafer and laptop is used, then data can be obtained from substrate treating apparatus, but the process is cumbersome and time-consuming requiring operator intervention
Solution Approach 1:
The sensor wafer is equipped with autonomous capabilities including onboard memory for data storage, wireless communication modules for automatic data transmission, and power management systems. The sensor wafer can independently transmit measured process data to external devices or servers without requiring operator intervention for data retrieval, thereby automating the data acquisition process and eliminating manual handling steps
Solution Approach 2:
The patent replaces the mechanical/manual data acquisition system with an automated electronic system. Instead of physically removing the sensor wafer and connecting it to a laptop via USB ports, the system uses wireless communication technologies (such as WiFi, Bluetooth, or other wireless protocols) to transmit data automatically. This substitution eliminates the need for manual mechanical operations and enables seamless automated data transfer
2Ease of operation
If manual data acquisition method is used, then data can be retrieved from sensor wafer, but data security problems occur due to requirement of laptop and manual handling
Solution Approach 1:
The patent introduces an intermediate data transmission layer between the sensor wafer and external systems. Instead of directly connecting the sensor wafer to a laptop or external device, the system uses wireless communication protocols and intermediate communication modules that enable secure data transfer. This intermediary layer can implement encryption, authentication, and other security measures to protect data during transmission, thereby maintaining data security while enabling automated retrieval
3Reliability
If sensor wafer stores data in memory until manual acquisition, then data is preserved, but data cannot be immediately utilized for optimization operations
Solution Approach 1:
The patent implements continuous data transmission functionality where the sensor wafer automatically and continuously transmits measured process data to external devices or servers in real-time. This continuous transmission eliminates the delay between data generation and data utilization, allowing immediate access to process data for optimization operations. The system maintains continuous connectivity and automatic upload capabilities, ensuring that data is always available for immediate use without waiting for manual retrieval
Data Source
AI summary
The inventive concept provides a sensor station. The sensor station includes a body providing an inner space for storing a substrate-type sensor; a power source unit installed at the body and configured to transmit a power to the substrate-type sensor; a processing unit installed at the body and configured to process a data measured by the substrate-type sensor; and a communication unit installed at the body and configured to exchange a data with the substrate-type sensor and a server of a substrate treating system.