Sensor Mother Substrate Inspection Lines for Trace Defect Detection
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Solution Overview
Problem
Existing automated optical inspection methods struggle to detect defects in trace lines of input sensors, such as those used in display devices, due to their complexity and the difficulty in distinguishing between functional and non-functional components.
Innovation Solution
A mother substrate for sensors is designed with an inspection line system that includes symmetrical sub-inspection lines spaced apart from trace lines, allowing for effective detection of defects through automated optical inspection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If automated optical inspection is used to examine wiring in input sensors, then inspection coverage is improved, but detection precision for trace line defects deteriorates
Solution Approach 1:
The patent creates a copy of the trace line structure by forming an inspection line that is substantially parallel to and spaced apart from the actual trace line. This inspection line serves as a reference pattern that allows the automated optical inspection device to detect defects in the original trace line by comparing the two, thereby improving detection precision while maintaining inspection coverage
Solution Approach 2:
The inspection line acts as an intermediary element between the trace line and the inspection device. By introducing this intermediate reference structure, the system enables more accurate defect detection through automated optical inspection without requiring direct observation of the difficult-to-detect trace lines
2Adaptability or versatility
If trace lines are made complex to achieve proper sensor functionality, then sensor performance is improved, but detectability of defects deteriorates
Solution Approach 1:
The patent segments the trace line structure into two distinct parts: the functional trace line that performs sensor operations and the inspection line that is specifically designed for defect detection. This segmentation allows the functional trace line to have complex patterns necessary for sensor performance while the inspection line provides a simplified reference pattern for easy defect detection
Solution Approach 2:
The inspection line is created as a copy or replica of the trace line structure, maintaining substantially the same shape and pattern. This copying approach preserves the complexity needed for functional performance while providing a detectable reference that mirrors the trace line's geometry, making defects visible to inspection devices
Data Source
AI summary
Disclosed is a mother substrate for a sensor, the mother substrate including a base substrate, and a sensor substrate above the base substrate, and including a main part including a sensing area, a non-sensing area surrounding the sensing area in plan view, a sensing electrode in the sensing area, and a trace line in the non-sensing area, and electrically connected with the sensing electrode, and a peripheral part surrounding the main part in plan view, and including an inspection line spaced apart from the trace line and having a same shape as the trace line.