Transfer Mechanism Teaching Using Sensor Substrates for Position Correction
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Solution Overview
Problem
In semiconductor substrate processing systems, the transfer mechanism's accuracy is compromised due to gear backlash and hysteresis, leading to positional deviations of several tens of micrometers, which affect the precision of substrate placement and increase downtime during gas supply and cleaning processes.
Innovation Solution
A teaching method that uses a position detection sensor-equipped inspection substrate to detect deviations and correct the transfer position data of the transfer mechanism, allowing for precise alignment without manual intervention and reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the transfer mechanism uses gear-based transmission, then it can achieve mechanical movement and substrate transfer, but gear backlash and hysteresis cause positional deviations of several tens of micrometers
Solution Approach 1:
The system uses position detection sensors to detect the actual position of the substrate and feeds this information back to the control unit. The control unit then corrects transfer position data based on detected deviations, creating a closed-loop feedback system that compensates for gear backlash and hysteresis effects
Solution Approach 2:
The patent replaces pure mechanical positioning with a hybrid system that combines mechanical transfer with optical/electrical position detection and digital correction. Instead of relying solely on mechanical precision, the system uses sensors and software to achieve accurate positioning
2Ease of operation
If manual teaching method is used to correct transfer positions, then operational flexibility is maintained, but downtime increases due to atmospheric exposure and cleaning requirements
Solution Approach 1:
The system performs automatic teaching operations using the position detection sensor and control unit without requiring manual intervention. The substrate processing system teaches itself by detecting positional deviations and automatically correcting transfer position data, eliminating the need for operators to manually open chambers for atmospheric exposure
Solution Approach 2:
The position detection sensor acts as an intermediary between the mechanical transfer mechanism and the control system. It enables automatic detection and correction of positional deviations without requiring manual measurement or intervention, bridging the gap between mechanical operation and digital control
3Measurement precision
If inspection substrate with camera is used for teaching, then position detection capability is improved, but device complexity increases
Solution Approach 1:
The position detection sensor is integrated into the existing substrate handling system and can be used for multiple purposes including teaching operations, position verification, and quality control. This multi-functional approach reduces the need for separate dedicated teaching devices
Solution Approach 2:
Instead of using complex camera systems mounted on inspection substrates, the patent uses simpler position detection sensors that directly measure substrate position. The system creates a digital copy or representation of the physical position through sensor data, which is then used for correction purposes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances the accuracy of substrate transfer positions, reduces downtime by eliminating the need for atmospheric exposure, and stabilizes the transfer precision through automated correction of positional deviations.
Implementation Method 1
detecting an amount of deviation between the first substrate or the edge ring and the target position using the position detection sensor of the second substrate
Data Source
AI summary
A teaching method for a transfer mechanism is provided. The teaching method includes (a) placing a first substrate or an edge ring on a fork of the transfer mechanism, transferring the first substrate or the edge ring to a target position, and placing the first substrate or the edge ring onto the target position; (b) placing a second substrate having a position detection sensor on the fork, and transferring the second substrate to a position directly above or below the target position; (c) detecting an amount of deviation between the first substrate or the edge ring and the target position using the position detection sensor of the second substrate; and (d) correcting transfer position data of the transfer mechanism for the first substrate or the edge ring to be transferred next, based on the detected amount of deviation.