Sensor Substrate Wireless Charging for Accurate Data Acquisition
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Solution Overview
Problem
In semiconductor manufacturing, existing data acquisition methods for substrate processing apparatuses face challenges in accuracy and efficiency due to the need for large, heavy batteries to power sensor wafers, which can alter environmental conditions and reduce data accuracy.
Innovation Solution
A method utilizing a carrier block, processing modules, and a substrate transport mechanism with a sensor substrate equipped with a rechargeable power supply section, allowing for non-contact charging via a second power supply section, enabling efficient data acquisition across multiple modules while maintaining accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If a large-capacity battery is mounted on the sensor wafer to enable measurements in all modules for a predetermined period, then the data acquisition duration is extended, but the environmental conditions in processing modules differ from those when a product wafer is loaded, decreasing measurement accuracy
Solution Approach 1:
The power supply function is segmented into two separate components: a small rechargeable battery mounted on the sensor wafer for brief measurements, and a large-capacity battery mounted on the carrier block for extended power supply. This segmentation allows the sensor wafer to remain lightweight while enabling long-duration measurements through multiple charge cycles.
Solution Approach 2:
The carrier block serves as an intermediary power supply system. It includes a large-capacity battery that can wirelessly transmit power to the sensor wafer when needed, acting as a mediator that provides extended energy supply without requiring the sensor wafer itself to carry a large battery.
2Duration of action of moving object
If a large-capacity battery is mounted on the sensor wafer, then the power supply duration is extended, but the weight and size of the sensor wafer increase
Solution Approach 1:
The power supply system is divided into two parts: a compact rechargeable battery integrated into the sensor wafer for immediate use, and a large-capacity battery in the carrier block that serves as a external power reservoir. This segmentation enables the sensor wafer to remain lightweight while the system as a whole achieves extended operational duration.
Solution Approach 2:
The sensor wafer is equipped with a rechargeable battery that can be rapidly recharged wirelessly from the carrier block's large-capacity battery. This self-service capability allows the lightweight sensor wafer to replenish its power supply multiple times during the measurement period, achieving extended operational duration without increasing its own weight.
3Device complexity
If a wire connection is used to connect the sensor wafer to the power supply section, then the power supply is simplified, but the operator must manually load the sensor wafer, reducing operational efficiency
Solution Approach 1:
The mechanical wire connection between the sensor wafer and power supply is replaced with a wireless power transmission system. The carrier block's large-capacity battery can wirelessly transmit power to the sensor wafer's rechargeable battery, eliminating the need for physical connections and manual intervention while maintaining power supply functionality.
Solution Approach 2:
The sensor wafer is equipped with an autonomous rechargeable battery that can be automatically recharged wirelessly from the carrier block. This self-service power management system eliminates the need for manual wire connections or operator intervention, allowing the substrate transport mechanism to automatically load and unload sensor wafers while maintaining continuous power supply capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the capacity and weight of the power supply on sensor wafers, allowing for rapid charging and high-accuracy data acquisition, ensuring the sensor wafer's conditions match those of the product wafer, thus improving inspection efficiency and accuracy.
Implementation Method 1
charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base
Data Source
AI summary
A method that acquires data on a processing module of a substrate processing apparatus using a sensor substrate efficiently and highly precisely is provided. The method includes: holding a sensor substrate by a first holding member, the sensor substrate having a sensor section for acquiring data on the processing modules and a first power supply section with a rechargeable electricity storage section for supplying electric power to the sensor section; advancing the first holding member to transfer the sensor substrate to a processing module; acquiring data on the processing module by the sensor section of the sensor substrate; and causing the first holding member to receive the sensor substrate, whose electric charge is consumed, from the processing module and retract, and with that state, charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base.