Sensor Support Structure Stress Isolation via Contact Region Offset
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Solution Overview
Problem
Physical quantity sensors, such as acceleration sensors, face reduced detection sensitivity due to stress issues caused by the supporting body being pushed by wires and thermal expansion differences between materials like silicon and glass substrates.
Innovation Solution
The design includes a movable body supported via coupling sections and a supporting section with a connection region and contact regions arranged to increase the distance from the support axis, allowing for reduced stress influence and improved thermal expansion management, with optional features like stress buffering sections and a hollow post section for enhanced contact and fixation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the contact regions are arranged on the support axis to simplify the structure, then the device complexity is reduced, but the stress from the wire pushes the supporting body and affects the torsion bar, deteriorating detection sensitivity
Solution Approach 1:
The contact regions are moved from the support axis (1-axis arrangement) to positions off the support axis (2-axis arrangement), increasing the distance between the contact regions and the support axis. This dimensional change allows the wire's pushing force to act farther from the torsion bar, reducing stress transmission and improving detection sensitivity while maintaining structural simplicity
2Reliability
If the supporting body is pushed by the wire to ensure electrical contact, then the electrical connection is reliable, but stress occurs in the supporting body and affects the torsion bar
Solution Approach 1:
The supporting body acts as an intermediary element that transmits electrical force from the wire to the movable body while isolating the torsion bar from direct stress. By positioning contact regions away from the support axis, the supporting body mediates the force transmission path, ensuring reliable electrical contact while minimizing stress impact on the sensitive torsion bar
3Stability of the object's composition
If the supporting body is fixed to the substrate to stabilize the structure, then the structural stability is improved, but stress occurs due to thermal expansion difference between silicon and glass substrates
Solution Approach 1:
The supporting body is segmented into distinct functional regions: contact regions for electrical connection, a connection region for structural support, and coupling sections for mechanical linkage. This segmentation allows each region to be optimized independently - the connection region can be designed to accommodate thermal expansion differences while maintaining overall structural stability and reducing stress transmission to the torsion bar
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances detection sensitivity by minimizing stress effects on the coupling sections and improving thermal expansion compatibility, leading to more accurate and reliable sensor performance.
Implementation Method 1
a supporting section configured to support the movable body via coupling sections extending along a first axis
Implementation Method 2
contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate
Data Source
AI summary
A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate.