Sensor-Based Sustainability Monitoring for Process Chamber Resource Use
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Solution Overview
Problem
The semiconductor manufacturing industry faces significant environmental impact due to resource consumption and waste generation, necessitating more ecologically-friendly methods, yet existing solutions lack effective eco-efficiency monitoring and require specialized training.
Innovation Solution
A system and method utilizing sensors, both integral and external to the manufacturing equipment, to collect data for eco-efficiency characterization, including machine learning models to determine environmental resource usage and provide real-time feedback through a graphical user interface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If comprehensive sensor monitoring is implemented to track environmental resource usage, then measurement precision of eco-efficiency is improved, but device complexity increases
Solution Approach 1:
The monitoring system is segmented into multiple independent sensor components (power sensors, flow sensors, temperature sensors, etc.) that can be selectively deployed based on specific measurement needs. Each sensor targets a particular resource parameter, allowing the system to achieve comprehensive monitoring precision without requiring a monolithic complex system.
Solution Approach 2:
The system employs a universal data processing platform that can handle multiple types of sensor data (power, flow, temperature, pressure) through standardized interfaces and common processing algorithms. This multi-functional approach allows a single system architecture to measure various environmental resources without proportionally increasing complexity for each measurement type.
2Loss of information
If real-time environmental resource usage data collection is implemented, then information completeness is improved, but loss of time increases
Solution Approach 1:
The system pre-configures data collection parameters, sensor mappings, and processing algorithms before actual measurement begins. Data processing rules and environmental factor models are established in advance, allowing real-time sensor data to be immediately processed without delay for configuration or algorithm selection, thus maintaining both completeness and speed.
Solution Approach 2:
The system implements continuous feedback loops where collected environmental data is immediately processed and used to adjust monitoring parameters in real-time. This feedback mechanism ensures that no critical information is lost while maintaining efficient processing by dynamically adapting to current process conditions rather than using static, time-consuming analysis.
Data Source
AI summary
In embodiments, a method includes receiving, by a processing device, first sensor data generated by a plurality of sensors of a process chamber of a manufacturing system during execution of a fabrication process. The method includes receiving, by the processing device, second sensor data generated by one or more external sensors that are not components of the process chamber during execution of the fabrication process. The method includes determining, by the processing device, environmental resource usage data indicative of an environmental resource consumption of the fabrication process run on the process chamber based on the first sensor data and the second sensor data. The method includes providing, by the processing device, the environmental resource usage data for display on a graphical user interface (GUI).