Chemical Source Vessel Sensor Tube With Pressure Equalization
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Solution Overview
Problem
Existing liquid level sensors in chemical vessels for semiconductor processing experience false readings due to bubble formation during boiling or vaporization, leading to inaccurate liquid level measurements and triggering unnecessary safety measures.
Innovation Solution
A liquid level sensor design with a slot or channel in the sensor tube to equalize pressure and a shield or splash wall to prevent liquid splash, ensuring accurate liquid level detection in high-temperature environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a liquid level sensor is used in a chemical vessel during boiling or vaporization, then liquid level monitoring is achieved, but false readings occur due to bubble formation in the sensor tube
Solution Approach 1:
The sensor tube is segmented by introducing a slot or channel that divides the internal space, allowing bubbles to escape through the slot while liquid remains contained. This segmentation prevents bubble accumulation that causes false readings, thereby improving measurement reliability during boiling or vaporization processes
Solution Approach 2:
The slot or channel acts as an intermediary element within the sensor tube that mediates between the liquid and bubble phases. It allows selective passage of bubbles while maintaining liquid containment, enabling accurate level detection without interference from vapor bubbles formed during heating
2Measurement precision
If a liquid level sensor tube is placed in the chemical vessel, then liquid level can be detected, but liquid splash causes false readings and triggers safety measures
Solution Approach 1:
The harmful effect of liquid splash is extracted and removed from the sensor system by positioning the sensor tube to extend above the liquid surface and using a shield or baffle structure. This extraction prevents liquid droplets from reaching the sensor, eliminating false readings caused by splash while maintaining accurate level detection capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design prevents false readings by equalizing pressure and protecting the sensor from liquid splash, providing reliable liquid level measurements even during fast pulsing operations.
Implementation Method 1
A liquid level sensor design with a slot or channel in the sensor tube to equalize pressure
Implementation Method 2
a shield or splash wall to prevent liquid splash, ensuring accurate liquid level detection
Implementation Method 3
a plurality of sensors disposed within the liquid level sensor tube housing, the plurality of sensors configured to indicate a level of a liquid chemical precursor within the vessel housing
Data Source
AI summary
A chemical vessel used for holding a liquid chemical precursor is disclosed comprising a liquid level sensor tube. The liquid level sensor tube is configured to operate in an environment where the liquid chemical precursor is heated to a point of boiling or vaporization. The liquid level sensor tube comprises housing with a slot built in to prevent any false readings of sensors disposed within the liquid level sensor tube. The liquid level sensor tube can be protected by a shield from unwanted liquid splashing during introduction of liquid into the environment. The liquid may be introduced through an inlet, and a splash wall may be between the liquid level sensor tube and the inlet port, thereby reducing the risk of unwanted liquid being displaced on the liquid level sensor tube.