Sensor-Integrated Valve Bonnet for Fluid Leak Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Fluid control devices lack the capability to acquire data related to their internal operations, which is essential for accurate control and leak detection, especially in advanced film forming processes like Atomic Layer Deposition.
Innovation Solution
A fluid control device equipped with sensors, such as magnetic and pressure sensors, integrated into a bonnet part within a valve body, allowing for data acquisition through a communication cable connected via a slit in the valve body, enabling the detection of internal operations and leak detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a fluid control device is designed without internal sensors to maintain simple structure, then device complexity is reduced, but the ability to detect leaks and acquire operational data is lost
Solution Approach 1:
The patent combines multiple functions into the bonnet part: it serves as both a structural component and a sensor housing. The bonnet part integrates the magnetic sensor, pressure sensor, and communication cable routing, eliminating the need for separate sensor housings and reducing overall device complexity while maintaining leak detection capability
Solution Approach 2:
The bonnet part is designed as a multi-functional component that simultaneously provides structural support, sensor mounting, signal transmission pathways, and leak detection functionality. This universal design allows a single component to fulfill multiple roles, reducing the total number of parts needed in the system
2Loss of information
If sensors are installed inside the fluid control device to enable data acquisition, then operational data can be acquired, but the device structure becomes more complex
Solution Approach 1:
The sensors are nested within the bonnet part structure, with the magnetic sensor and pressure sensor housed inside the bonnet part's internal cavities. The communication cable is routed through pre-formed pathways within the bonnet part. This nesting approach allows sensor integration without adding external complexity to the overall device structure
Solution Approach 2:
The bonnet part acts as an intermediary structure that houses the sensors and provides communication pathways between the internal sensors and external processing units. This intermediary design allows data acquisition functionality to be added without requiring direct modification of the main valve body or flow path components
3Loss of information
If the communication cable is routed through the valve body to connect sensors, then data transmission is enabled, but the flow path may be affected
Solution Approach 1:
The valve body is segmented into distinct functional zones: the flow path section and the bonnet part section. The communication cable routing is confined to the bonnet part, which is separated from the main flow path by the valve internal structure. This segmentation ensures that cable routing activities do not interfere with flow path integrity or fluid control operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the acquisition of data related to internal operations, enhancing the accuracy of fluid control and leak detection, thereby improving the reliability and efficiency of fluid control devices in semiconductor manufacturing processes.
Implementation Method 1
one of the sensor may be a magnetic sensor detecting changes in a magnetic field of a magnet and a magnetic body separated from each other
Implementation Method 2
one of the sensor may be a pressure sensor detecting a pressure in a space isolated by a diaphragm
Data Source
AI summary
A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.