Sensor-Integrated Valve Assembly for Precise Semiconductor Flow Control
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Solution Overview
Problem
Current Mass Flow Controllers (MFCs) used in semiconductor wafer manufacturing are expensive and often redundant, as they include processor-based control units and advanced diagnostics systems that exceed manufacturers' needs, leading to increased costs and inefficiencies due to redundant hardware and functional services.
Innovation Solution
A valve assembly integrating a stand-alone valve with a sensor chip package and a controller interface that uses measured parametric values to adjust the valve stroke, allowing for precise control of fluid flow rates at multiple set points and during shutdowns and restarts, without the need for redundant processor-based control units and sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If current state of the art MFCs are equipped with processor based control units, a multitude of sensors, and an advanced diagnostics system, then measurement precision and reliability are improved, but device complexity and cost increase significantly
Solution Approach 1:
The patent extracts and removes the redundant processor-based control unit, multitude of sensors, and advanced diagnostics system from the MFC, retaining only the essential valve assembly and controller interface components needed for flow rate control, thereby reducing device complexity while maintaining measurement precision
Solution Approach 2:
The patent replaces expensive, complex MFC systems with a simpler, more cost-effective valve assembly that uses basic sensors and a streamlined controller interface, achieving the same flow control functionality at lower cost and complexity
2Reliability
If current state of the art MFCs are equipped with processor based control units and advanced diagnostics systems, then reliability is improved, but cost increases beyond manufacturer needs
Solution Approach 1:
The patent removes redundant hardware components including the processor-based control unit and advanced diagnostics system, keeping only the essential valve assembly and controller interface that provide sufficient operational reliability for semiconductor manufacturing
Solution Approach 2:
The simplified controller interface performs multiple functions including flow rate measurement, valve control, and basic diagnostics, eliminating the need for separate dedicated hardware components while maintaining operational reliability
3Adaptability or versatility
If MFCs operate at multiple set points and constantly shutdown and restart, then adaptability is improved, but device complexity and cost increase
Solution Approach 1:
The patent implements a dynamic valve assembly with a moveable member that can rapidly adjust to multiple set points and handle shutdown/restart operations, providing the needed adaptability through mechanical dynamics rather than complex electronic control systems
Data Source
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AI summary
A valve assembly for controlling fluid flow rate comprising a valve block, a valve, a sensor chip package, and a controller interface. The valve block having an upstream reservoir, a downstream reservoir, and a valve seat for communicating fluid from an upstream location to a downstream location. The valve having a moveable member. The sensor chip package having at least one sensor coupled with the valve. The controller interface is communicable coupled to a control unit, the valve, and the sensor chip package. The controller interface sends at least one parametric value provided by the sensor chip package to the control unit. The controller interface receives a control signal used to adjust valve stroke of the valve. The control signal of the valve is determined based on the at least one measured parametric value and at least one other parametric value provided by a fluid processing system.