Measurement Chamber Sensor Venting for Low-Contamination Mask Qualification
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Solution Overview
Problem
Existing sensor arrangements for measurement chambers allow contaminants and outgassing from adhesive layers to enter the measurement chamber, affecting measurement results and reliability in mask qualification processes.
Innovation Solution
A sensor arrangement with a fluid connection and adhesive layer to extract contaminants and outgassing by suction, utilizing a vacuum source and flushing medium to maintain a pressure gradient and reduce contamination, and a flushing device to enhance cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sensor arrangement is used for measurement chamber, then measurement capability is provided, but contaminants and outgassing from adhesive layers enter the measurement chamber affecting measurement results
Solution Approach 1:
The harmful adhesive layer is extracted from the measurement chamber environment by mounting the sensor on a carrier that extends into the chamber. The adhesive is confined to the carrier structure outside the sealed chamber volume, allowing the sensor to function inside while the contaminant source is physically separated and removed from the measurement environment.
Solution Approach 2:
The carrier acts as an intermediary structure between the sensor and the measurement chamber. It provides a mounting platform that allows the sensor to access the chamber interior while keeping the adhesive layer on the carrier body outside the sealed chamber, thus mediating between the need for sensor access and the need to prevent contamination.
2Strength
If adhesive layer is used to mount sensor, then sensor fixation is achieved, but outgassing from adhesive enters measurement chamber
Solution Approach 1:
The adhesive layer is extracted from the measurement chamber interior and placed on the carrier structure that extends into the chamber. This allows the adhesive to provide mounting strength for the sensor while being positioned outside the sealed chamber volume, preventing outgassing from entering the measurement environment.
Solution Approach 2:
The carrier with adhesive layer can be designed as a disposable component that is replaced periodically. This allows use of standard adhesives that provide sufficient mounting strength without requiring specialized low-outgassing materials, as the carrier can be discarded after a certain service life when contamination risk increases.
3Ease of operation
If particles and gases enter measurement chamber from sensor arrangement, then sensor operation is enabled, but measurement reliability deteriorates over time
Solution Approach 1:
Potential contaminants including particles and gases are extracted from the measurement chamber environment by confining them to the carrier structure outside the sealed chamber. The sensor operates inside the chamber while the contaminant source is physically separated, enabling continuous operation without compromising measurement reliability.
Solution Approach 2:
The system is segmented into a sealed measurement chamber interior and an unsealed carrier exterior. This segmentation allows the sensor to operate in the clean chamber environment while the carrier housing contaminants, creating distinct zones that prevent contamination transfer and maintain measurement reliability over time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces contamination and outgassing, improving measurement reliability and defect detection in mask qualification processes.
Implementation Method 1
The fluid connection can be designed to extract a medium from the measurement chamber by suction during operation of the sensor arrangement
Implementation Method 2
The fluid connection is designed to extract a medium from the measurement chamber by suction during operation of the sensor arrangement
Implementation Method 3
The intake opening can be entirely or partially filled with a medium permeable to the fluid
Data Source
AI summary
A sensor arrangement for arrangement on a measurement chamber, wherein the sensor arrangement comprises: a sensor; an intake opening; an outlet; and a fluid connection between the intake opening and the outlet.