Physical Quantity Sensor Wiring Crossing Restricting Section
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Solution Overview
Problem
Existing acceleration sensors face challenges in improving sensitivity and shock resistance due to limitations in wiring flexibility and the absence of a stopper to restrict excessive displacement, leading to reduced detection accuracy and increased risk of electrode damage.
Innovation Solution
A physical quantity sensor design that includes a substrate with a movable section, fixed electrodes, and a restricting section to prevent excessive displacement, along with wires that cross the restricting section to enhance shock resistance and detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If wires are drawn around to avoid crossing the restricting section, then wiring layout flexibility is reduced, but wire routing is simplified
Solution Approach 1:
The patent allows wires to cross the restricting section in the plan view by utilizing the third dimension (z-axis) for wire routing. The wires are configured to pass underneath or over the restricting section rather than being constrained to remain in the same plane, thus resolving the contradiction between wiring flexibility and routing simplicity.
2Measurement precision
If the element section size is increased to improve sensitivity, then the region allocated to the element section increases, but the overall sensor size increases
Solution Approach 1:
The patent implements a nested configuration where the first and second wires are routed to cross the restricting section, allowing the element section to be positioned more centrally and efficiently within the sensor region. This nesting of wire paths through the restricting section enables maximization of the element section area without proportionally increasing the overall sensor footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design improves detection accuracy and shock resistance by preventing excessive displacement and reducing the size of the sensor region, allowing for increased sensitivity and reliability.
Implementation Method 1
the movable section is displaced by acceleration applied thereto, whereby the capacitance changes. The acceleration sensor can detect the applied acceleration on the basis of the change in the capacitance.
Data Source
AI summary
A physical quantity sensor includes a substrate, a movable section displaceable in a first direction with respect to the substrate, first and second movable electrode sections provided in the movable section, a first fixed electrode section fixed to the substrate and disposed to be opposed to the first movable electrode section in the first direction, a second fixed electrode section fixed to the substrate and disposed to be opposed to the second movable electrode section in the first direction, a restricting section configured to restrict a movable range in the first direction of the movable section, a first wire provided on the substrate and electrically connected to the first fixed electrode section, and a second wire provided on the substrate and electrically connected to the second fixed electrode section. The first wire and the second wire are respectively cross the restricting section in a plan view of the substrate.