Separable Pedestal Design for Large Substrate Exposure Apparatus
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing exposure apparatuses for producing large liquid crystal display elements face challenges in transportation due to the increased size of substrates and stages, which limits the size of the pedestals and hinders the transportation of the equipment.
Innovation Solution
The exposure apparatus is designed with separable lower and upper pedestals, where the projection optical system and mask stage are mounted on the upper pedestal, and the substrate stage is supported by multiple lower pedestals that can be separated and reconfigured to fit on a vehicle, allowing for transportation of a large substrate stage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the exposure apparatus is designed with a large substrate stage to accommodate large substrates, then the substrate size capability is improved, but the transportation capability deteriorates due to the limited size of pedestals
Solution Approach 1:
The pedestal is divided into multiple separable components (first pedestal, second pedestal, third pedestal, fourth pedestal) that can be detached and reconfigured. This segmentation allows the large substrate stage to be supported by distributed smaller pedestal units that can be transported separately and assembled at the destination, resolving the contradiction between large substrate capability and transportation ease.
2Strength
If the pedestals are made larger to support large substrate stages, then the substrate stage support capability is improved, but the transportation flexibility deteriorates
Solution Approach 1:
The support structure is segmented into multiple independent pedestals that can be configured in different arrangements. Each pedestal maintains sufficient strength to support the substrate stage, while the modular nature provides flexibility for transportation by allowing the pedestals to be separated and reconfigured based on vehicle constraints.
Solution Approach 2:
The pedestal configuration is made dynamic and adaptable rather than fixed. The system can transition between a configured state for operation (with pedestals positioned to support the large substrate stage) and a transported state (with pedestals separated and reconfigured to fit vehicle dimensions), providing both strength and flexibility.
3Stability of the object's composition
If a single large pedestal is used to hold the mask stage and projection optical system, then the structural stability is improved, but the device complexity for assembly and disassembly increases
Solution Approach 1:
The single large pedestal is segmented into multiple smaller pedestals (first, second, third, fourth pedestals) that can be independently handled and assembled. This reduces the complexity of transportation and assembly while maintaining structural stability through the distributed support configuration and precise alignment mechanisms provided by the intermediate pedestals.
Data Source
AI summary
An exposure apparatus for exposing a pattern formed on a mask (M) onto a photosensitive substrate (P) through a projection optical system (PL), comprising an upper pedestal (26) on which at least one of the projection optical system (PL) and a mask stage (MST) which is to hold the mask (M) is mounted, and a plurality of lower pedestals (6a) which supports the upper pedestal (26) and which has a longitudinal direction in a predetermined direction.