Separable Plasma Chamber Assembly for Lower Ceiling Replacement Cost
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Solution Overview
Problem
The high cost associated with replacing chambers in plasma processing devices is a significant challenge due to the wear and tear of components, particularly the ceiling member, which requires frequent maintenance.
Innovation Solution
The substrate processing device is designed with a separable first and second chamber structure, where the first member, which is prone to wear, can be easily replaced, while the second member serves as a return path for RF waves and is made of a different material to reduce wear and maintenance costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the chamber is designed as a single integrated unit, then the structural integrity and electrical continuity are improved, but the maintenance cost and replacement frequency increase due to wear of components like the ceiling member
Solution Approach 1:
The chamber is divided into multiple separate members (first member including ceiling, second member including side wall, third member including bottom wall) that can be independently replaced. This segmentation allows the worn ceiling member to be replaced without replacing the entire chamber, reducing maintenance costs while maintaining structural integrity through the coordinated assembly of multiple members.
Solution Approach 2:
The second member serves multiple functions: it provides structural support for the first member, acts as a return path for RF waves, and serves as a ground member. This multi-functionality allows a single component to fulfill multiple roles, improving overall system reliability while simplifying the replacement strategy.
2Duration of action of stationary object
If the ceiling member is made of material resistant to wear, then the maintenance frequency is reduced, but the manufacturing cost increases
Solution Approach 1:
By segmenting the chamber into replaceable members, the patent allows the use of expensive wear-resistant materials for only the ceiling member (first member) that requires it, while other members can use less expensive materials. This reduces overall manufacturing cost while maintaining the durability needed where most critical.
Solution Approach 2:
The design enables the ceiling member to be discarded and replaced when worn, rather than requiring the entire chamber to be replaced. This approach recovers the value of the durable side wall and bottom wall members that remain functional, effectively reducing the average cost per maintenance cycle.
3Reliability
If the entire chamber is replaced when any component wears, then the processing reliability is maintained, but the downtime and operational cost increase
Solution Approach 1:
The chamber is segmented into independently replaceable members, allowing only the worn component (e.g., ceiling member) to be replaced while leaving other functional members in place. This significantly reduces replacement time and downtime compared to replacing the entire chamber, while maintaining processing reliability through the use of appropriate materials for each member.
Solution Approach 2:
The separable design allows for pre-prepared replacement members to be kept in stock, enabling quick swap-out of worn components without extensive disassembly or reconfiguration, thereby minimizing downtime while ensuring reliable processing continues with replacement parts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces the cost of replacing the chamber by allowing for simple and cost-effective maintenance of the worn first member, extending the lifespan of the chamber and minimizing downtime.
Implementation Method 1
the second member serving as a return path for RF waves
Data Source
AI summary
A substrate processing device includes a first member including a ceiling and a second member including a side wall and supporting the first member. The second member is electrically connected to a ground member that is grounded and surrounds a substrate support. The first member and the second member are individual members and separable from each other.