Separable Process Chamber Structure for Easier Substrate Maintenance
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in maintaining the chamber where substrate processing occurs, as the components are not easily accessible for maintenance.
Innovation Solution
A substrate processing apparatus is designed with a first chamber and a movable part, allowing for the separation and transport of a second chamber, which defines the processing space, outside the first chamber for easy maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the chamber components are integrated and fixed within the first chamber, then the structural stability is improved, but the ease of maintenance deteriorates
Solution Approach 1:
The processing chamber is divided into a first chamber (outer chamber) and a second chamber (inner chamber). The second chamber that defines the processing space is made separable from the first chamber, allowing it to be removed for maintenance while the first chamber remains stable and fixed. This segmentation enables independent access to the processing chamber for cleaning and maintenance without destabilizing the overall apparatus structure.
2Ease of repair
If the second chamber is made separable and transportable, then the ease of maintenance is improved, but the device complexity increases
Solution Approach 1:
The second chamber is disposed within the first chamber in a nested configuration. The second chamber can be moved upward and outward through an opening in the first chamber's sidewall for maintenance, then returned to its nested position. This nesting arrangement allows the inner chamber to be accessed and removed without requiring complete disassembly of the outer chamber, reducing the overall complexity compared to fully modular designs.
Solution Approach 2:
The second chamber is designed with movable parts including a lift mechanism for vertical movement and a clamp mechanism with release mechanism for securing and releasing the chamber. These dynamic elements enable the second chamber to be easily removed and reinstalled, providing maintenance accessibility without requiring permanent disassembly or complex fixed mounting structures.
3Reliability
If the clamp and release mechanism are added to fix and release the second chamber, then the reliability of chamber fixation is improved, but the device complexity increases
Solution Approach 1:
The clamp mechanism is designed to automatically secure the second chamber to the movable part when the chamber is in position, and the release mechanism allows for easy disengagement without requiring complex manual intervention. The system provides reliable fixation through the clamp's inherent mechanical engagement features while maintaining simplicity through intuitive release operation.
Data Source
AI summary
A substrate processing apparatus is provided. The substrate processing apparatus comprise: a first chamber including a sidewall providing an opening, the first chamber further including a movable part movable upward and downward within the first chamber; a substrate support disposed within the first chamber; a second chamber disposed within the first chamber and defining, together with the substrate support, a processing space in which a substrate mounted on the substrate support is processed, the second chamber being separable from the first chamber and transportable between an inner space of the first chamber and the outside of the first chamber via the opening; a clamp releasably fixing the second chamber to the movable part extending above the second chamber; a release mechanism configured to release the fixing of the second chamber by the clamp; and a lift mechanism configured to move the movable part upward and downward.