Separate Vacuum Chamber for Laser Length Meter
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Solution Overview
Problem
The existing installation structures for length meters in vacuum chambers require opening the chamber for laser light axis adjustment, leading to increased difficulty and time in achieving accurate adjustments, especially when the input and output surfaces of the laser light are perpendicular, which also results in a larger vacuum chamber size and reduced measurement accuracy.
Innovation Solution
The solution involves a separate vacuum chamber for the length meter with a configuration that allows for accurate and simple laser light axis adjustment without opening the main vacuum chamber, using a vacuum sealing mechanism to maintain airtightness and reduce the effect of pressure differences, and incorporating a detachable cover for easy operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the length meter is installed inside the vacuum chamber A together with the object to be measured, then the measurement can be performed in vacuum, but the vacuum chamber must be opened for laser light axis adjustment which increases difficulty and time
Solution Approach 1:
The system is divided into two separate vacuum chambers: vacuum chamber A for the object to be measured and vacuum chamber B for the length meter. This segmentation allows independent access and adjustment of each chamber, enabling laser light axis adjustment of the length meter without opening vacuum chamber A, thus resolving the contradiction between maintaining vacuum integrity and facilitating adjustment operations.
2Volume of moving object
If the input surface and output surface of the laser light are arranged in perpendicular direction, then the compactness is improved, but the adjustment difficulty increases and measurement accuracy decreases
Solution Approach 1:
The laser light path is configured to pass through laser light axis holes in the side wall of vacuum chamber B, utilizing the spatial dimension of the chamber wall to route the optical path. This dimensional approach allows perpendicular arrangement of input and output surfaces while maintaining adjustable alignment through the side wall openings, resolving the contradiction between compactness and adjustability.
3Ease of operation
If the vacuum chamber is opened for adjustment, then access to the length meter is improved, but pressure differences affect the mounting position and laser light axis position
Solution Approach 1:
By separating the length meter into its own vacuum chamber B, the system enables adjustment operations on the length meter while vacuum chamber B is opened, without affecting the pressure environment or mounting position accuracy of components in vacuum chamber A. The pressure difference impact is isolated to chamber B only.
4Adaptability or versatility
If the length meter is installed on the side of the vacuum chamber, then the integration is improved, but the laser light axis adjustment requires opening the chamber which increases time
Solution Approach 1:
The length meter is integrated into a separate vacuum chamber B that is mounted on the side of vacuum chamber A. This segmentation allows the length meter to be adjusted by opening only vacuum chamber B, eliminating the need to open vacuum chamber A, thus reducing adjustment time while maintaining integration flexibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables precise adjustment of the laser light axis without opening the vacuum chamber, maintaining accurate measurement accuracy and reducing the size of the vacuum chamber, while minimizing the impact of pressure differences, thus enhancing the measurement precision and operational efficiency.
Implementation Method 1
a vacuum sealing mechanism to maintain airtightness
Implementation Method 2
a laser length meter which is used as a unit for measuring an accurate displacement amount of the specimen moved by the XY stage
Data Source
AI summary
A vacuum chamber B which stores a length meter is provided separately from a vacuum chamber A in which an object to be measured is installed, an installation base 5 which is integrally mounted to a surface plate 10 that supports the chamber A and/or an object to be measured is installed on a side portion of the vacuum chamber A, and the vacuum chamber B is disposed and installed on the installation base 5 so that a side wall thereof overlaps a side wall A1 of the vacuum chamber A with a side plate member 13 interposed therebetween.