Separated POU Gas Abatement to Prevent Ammonium Byproducts
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Solution Overview
Problem
Existing abatement devices in semiconductor processing facilities face significant maintenance challenges and production losses due to the formation of ammonium compounds when gas streams from different process chambers are commingled, leading to the creation of unwanted byproducts like ammonium fluoride and ammonium hexafluorosilicate, which requires costly and space-consuming dedicated systems for each process chamber.
Innovation Solution
A compact point-of-use (POU) abatement device with multiple independent flow paths and dedicated oxidation and wet scrubber columns for each process chamber, ensuring complete separation of gas streams until they are sufficiently abated, reducing the formation of unwanted byproducts and maintaining production uptime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If gas streams from multiple process chambers are commingled in a common exhaust line, then device complexity is reduced, but harmful byproducts (ammonium compounds) are created requiring frequent maintenance
Solution Approach 1:
The patent divides the common exhaust line into multiple separate flow paths, with each path dedicated to a specific process chamber. This segmentation prevents different gas streams from mixing, thereby eliminating the formation of ammonium compounds while maintaining a relatively simple overall device structure through shared abatement components.
2Object-generated harmful factors
If dedicated POU abatement systems are implemented for each process chamber, then harmful byproduct formation is eliminated, but device complexity and space requirements increase significantly
Solution Approach 1:
The patent combines multiple separate flow paths into a single integrated abatement device housing. While each process chamber has its own dedicated flow path, the oxidation devices, wet scrubber columns, and control systems are shared across all paths, reducing overall device complexity and space requirements compared to fully dedicated systems.
3Object-generated harmful factors
If gas streams are completely separated through dedicated flow paths, then ammonium compound formation is prevented, but maintenance time and production loss increase due to frequent cleaning requirements
Solution Approach 1:
By segmenting the exhaust into separate flow paths for different process chambers, the patent prevents the formation of ammonium compounds that would require frequent cleaning. This segmentation maintains cleaner exhaust lines that require less maintenance time, thereby reducing production loss.
4Area of stationary object
If common exhaust lines are used to reduce space consumption, then space efficiency is improved, but harmful byproducts are created requiring frequent maintenance
Solution Approach 1:
The patent implements segmentation within a compact housing, creating separate flow paths for different process chambers. This approach maintains space efficiency by consolidating multiple paths into a single device footprint, while simultaneously preventing ammonium compound formation through physical separation of gas streams.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces and eliminates the development of unwanted byproducts by maintaining total separation of gas streams through the abatement process, thereby minimizing maintenance requirements and increasing production uptime without the need for economically unfeasible dedicated systems for each process chamber.
Implementation Method 1
a plurality of oxidation devices and a corresponding plurality of isolated wet scrubber columns each directly coupled to a respective one of the plurality of inlets
Implementation Method 2
a plurality of oxidation devices and a corresponding plurality of isolated wet scrubber columns each directly coupled to a respective one of the plurality of inlets
Data Source
AI summary
Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.