Supporting Member Separation Apparatus with Constant Force Control
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Solution Overview
Problem
The separation of a supporting member from a laminate using an adhesive and light-sensitive release layer is challenging due to uneven alteration of the release layer properties, leading to potential damage or deformation of the substrate during separation.
Innovation Solution
A supporting member separation apparatus and method that includes a holding unit, a lifting and lowering unit, and an adjustment unit to maintain a constant force during separation, utilizing a light-sensitive release layer to facilitate the separation of the supporting member from the laminate with minimal damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the supporting member and substrate are firmly adhered using an adhesive layer, then adhesion strength is improved, but separation becomes difficult and may cause damage to the substrate
Solution Approach 1:
A release layer is disposed between the adhesive layer and the supporting member before adhesion occurs. This release layer has a property that changes when irradiated with light, enabling future separation. The preliminary placement of this layer allows the system to achieve both strong adhesion during manufacturing and easy separation afterward without damaging the substrate.
Solution Approach 2:
The release layer undergoes a property change when irradiated with light, transforming from a state that prevents adhesion interference to a state that enables separation. This parameter change allows the same layer to serve dual functions: maintaining firm adhesion during manufacturing and facilitating gentle separation afterward, thereby resolving the contradiction between adhesion strength and separation ease.
2Ease of operation
If the release layer is irradiated with light to alter its properties, then separation ease is improved, but uneven alteration causes inappropriate separation and substrate damage
Solution Approach 1:
The adjustment unit maintains a constant force applied to the holding unit during the separation process. This feedback mechanism ensures that even if the release layer has different degrees of alteration in different areas, the separation proceeds uniformly without causing substrate damage. The constant force adjustment compensates for local variations in release layer properties.
Solution Approach 2:
The separation process uses a dynamic force application system where the holding unit can be vertically raised while the adjustment unit maintains constant force. This dynamic approach allows the system to adapt to uneven release layer alteration, ensuring appropriate separation across the entire supporting member without damaging the substrate.
3Productivity
If a large force is applied to separate the supporting member, then separation speed is improved, but substrate damage or deformation increases
Solution Approach 1:
The release layer serves as an intermediary between the adhesive layer and the supporting member. When its properties are changed by light irradiation, it enables separation with relatively small force. This intermediary layer acts as a controlled failure plane, allowing the supporting member to be separated from the substrate without applying large forces that would damage the substrate, thus maintaining both productivity and substrate integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the separation of the supporting member with a relatively small force while preventing damage or deformation of the substrate, ensuring a stable and controlled separation process.
Implementation Method 1
a release layer which has a property that changes when irradiated with light may be disposed in advance between an adhesive layer that adheres the wafer substrate and the support plate with each other and the support plate. After the property of the release layer is changed (altered) by irradiating the release layer with light
Data Source
AI summary
A supporting member separation apparatus that separates a supporting member from a laminate having a substrate, an adhesive layer, a release layer which has a property that changes when it absorbs light, and the supporting member which are laminated in this order. The apparatus includes a holding unit that holds one surface of the laminate, a lifting and lowering unit that lifts and lowers the holding unit, and an adjustment unit that maintains a constant applied force to the holding unit.