Sequenced Low-Power Pulse Generator for Capacitive Plasma Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high power with high voltage and/or high current to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches, especially during high-frequency operations.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, electrically connected to achieve a higher output value through sequential activation and deactivation, allowing for step-function voltage delivery without continuous slope, and utilizing transformers with balancing windings for efficient energy distribution and cooling, along with a control unit for precise pulse shaping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of individual semiconductor switches is exceeded
Solution Approach 1:
The high-power generator is divided into multiple low-power generator modules, each with its own semiconductor switches operating within safe voltage limits. These modules are connected in series to achieve the required high output voltage, while each individual switch only handles a fraction of the total voltage, maintaining reliability while achieving high power delivery capability.
2Reliability
If multiple low-power generators are connected in series to achieve high voltage, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
Each low-power generator module is designed as a universal, identical unit that can function independently. All modules share the same structure, components, and control logic, making them interchangeable. This modular universality simplifies the overall system design, as the complexity is standardized and replicated rather than customized for each module.
Solution Approach 2:
The multiple low-power generator modules are nested in a series configuration where each module contains identical sub-components (switches, capacitors, inductors). This nested modular structure allows the system to achieve high voltage through series connection while maintaining manageable complexity at each level through repetition of standardized units.
3Speed
If all low-power generators are activated simultaneously to deliver high power, then the power delivery speed is improved, but the power loss and heat generation increase
Solution Approach 1:
Instead of activating all low-power generator modules simultaneously, the system employs periodic or sequential activation of modules during the pulse duration. This staged activation reduces the instantaneous power loss and heat generation in switching elements while still achieving the required pulse rise time through the coordinated sequential switching of multiple modules.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient and reliable delivery of high-power pulses with sharp voltage transitions, reducing power losses and enhancing load distribution among switching elements, thus supporting demanding plasma processes with improved voltage and current handling capabilities.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Implementation Method 2
utilizing transformers with balancing windings for efficient energy distribution
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - the control unit (22) may be further configured to select the contribution of the LP-generators (14, 16, 18) in a sequenced way through the LP-generators (14, 16, 18), in particular each pulse sequence may begin on a different LP-generator (14, 16, 18).