Sequencer for Automated and Manual-Assistance Jobs in Charged Particle Beam Devices
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Solution Overview
Problem
Current machine workstations for defect analysis and preparation of IC wafers for TEM/STEM imaging are inefficient due to non-dynamic scheduling, which causes unnecessary interruptions and idle time when manual assistance is required, as they cannot seamlessly transition between automated and manual tasks without human operator availability.
Innovation Solution
A device with a user interface and procedure scheduler that allows for dynamic switching between fully automated and manual assistance procedures based on the operator's availability, enabling continuous operation of automated tasks during unavailability and resuming manual tasks when the operator is ready.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the machine stops to wait for a human operator to perform manual assistance tasks, then the task can be completed with human judgment, but the machine experiences unnecessary idle time and reduced productivity
Solution Approach 1:
The scheduling system dynamically adjusts the execution sequence of procedures based on real-time operator availability status. When the operator is available, manual assistance procedures are executed; when unavailable, the system automatically skips to the next executable procedure, creating a dynamic schedule that adapts to changing conditions rather than following a fixed static sequence
Solution Approach 2:
The machine maintains continuous productive operation by identifying and executing procedures that can be performed automatically without human intervention. Instead of stopping idle during operator unavailability, the system continuously performs useful automated actions, ensuring the machine is productive whenever the operator is not present
2Ease of operation
If the machine waits for operator availability before executing manual tasks, then proper manual assistance can be provided, but the overall throughput is reduced due to interruptions and idle time
Solution Approach 1:
The system performs preliminary actions by executing all automatically executable procedures before the operator becomes available. By preparing the system state in advance and completing preparatory automated tasks, the machine minimizes the time the operator needs to spend at the workstation when they do arrive
Solution Approach 2:
The scheduling system acts as an intermediary between automated procedures and manual assistance tasks. It intelligently determines which procedures can be executed automatically and which require operator intervention, creating a seamless transition between automated and manual modes without requiring the operator to be present for every task
3Device complexity
If a static schedule is used for automated and manual tasks, then the schedule is simple to manage, but the machine cannot adapt to operator availability and experiences unnecessary interruptions
Solution Approach 1:
The scheduling system transitions from a static to a dynamic model where the execution sequence is determined by real-time operator availability. The system continuously monitors operator status and automatically adjusts which procedures to execute next, creating a dynamic schedule that optimizes productivity based on current conditions
Solution Approach 2:
The scheduling system serves itself by automatically determining the optimal execution sequence without requiring manual intervention to adjust the schedule. The system autonomously identifies which procedures can be executed automatically and which wait for operator availability, eliminating the need for complex manual schedule management
Data Source
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AI summary
A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.