Wafer-Level Sequencing Flow Cell Arrays With Differential Surfaces

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Solution Overview

Problem

Current flow cell designs for high-throughput biological and chemical analysis are costly and inefficient in utilizing functionalized surface area, leading to reduced data output in applications like DNA sequencing.

Innovation Solution

The method involves wafer-level packaging of sequencing flow cells with differential surfaces, where a semiconductor wafer is patterned with alternating hydrophilic and hydrophobic regions, and a cover wafer is bonded to form a composite structure that is then singulated into individual flow cells, allowing for efficient functionalization and nucleic acid macromolecule interaction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional flow cell designs are used, then fabrication cost is reduced, but functionalized surface area utilization is inefficient

Engineering Contradiction:
Improvefabrication costVSAvoidfunctionalized surface area utilization
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The flow cell substrate is divided into multiple discrete flow cells arranged in an array, with each flow cell containing multiple reaction sites. This segmentation allows parallel processing and efficient utilization of the functionalized surface area while maintaining cost-effective fabrication through batch processing of the entire substrate array.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from traditional single-flow-cell designs to a multi-dimensional array configuration where multiple flow cells are arranged in rows and columns on a single substrate. This dimensional expansion maximizes the functionalized surface area utilization by enabling simultaneous operation of numerous reaction sites across the substrate plane.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If conventional flow cell designs are used, then manufacturing simplicity is maintained, but data output is reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddata output
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

Multiple flow cells and their associated reaction sites are merged into a single integrated substrate array that can be manufactured as one unit. This merging approach maintains manufacturing simplicity by enabling batch fabrication while simultaneously increasing data output through the combined capacity of all flow cells and reaction sites in the array.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate array design provides universal functionality where each flow cell and reaction site can perform the same sequencing function simultaneously. This multi-functionality approach increases overall data output without requiring complex specialized designs for each individual flow cell, thereby maintaining manufacturing simplicity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of manufacture

If wafer level packaging is implemented, then fabrication cost is reduced and yield is improved, but process complexity increases

Engineering Contradiction:
Improvefabrication costVSAvoidprocess complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The wafer level packaging process utilizes standard semiconductor fabrication techniques and equipment to perform the packaging operations. By leveraging existing self-service capabilities in semiconductor manufacturing infrastructure, the process achieves cost reduction and yield improvement without requiring entirely new complex packaging equipment or procedures.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The invention applies parameter changes by transitioning from discrete component assembly to wafer-level batch processing, changing the scale and methodology of fabrication. This parameter change enables the use of established semiconductor manufacturing processes, reducing costs and improving yield while the associated process complexity is managed through familiarity with standard semiconductor fabrication workflows.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the cost of flow cell fabrication, improves yield, and enhances the functionalization of surface areas, leading to more effective DNA sequencing and analysis.

Implementation Method 1

The patterned layer has a differential surface that includes alternating first surface regions and second surface regions... either the first surface regions or the second surface regions are hydrophilic surfaces configured for receiving nucleic acid macromolecules for sequencing

Methodology Applied
Scientific EffectHydrophilic-Hydrophobic surface differentiation: Hydrophile

Data Source

PatentUS12057309B2Wafer level sequencing flow cell fabrication
Publication Date: 2024.08.06 MGI TECH CO LTD
  • US12057309B2 patent drawing
  • US12057309B2 patent drawing
  • US12057309B2 patent drawing

AI summary

A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.