Sequential Etching for Solar Cell Silicon Substrates

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Solution Overview

Problem

Silicon substrates used in solar cell fabrication often have defects such as cracks and uneven surfaces, which act as recombination regions for minority charge carriers, limiting solar cell conversion efficiency.

Innovation Solution

A sequential etching process is employed on the silicon substrate, using different concentrations of etchants like potassium hydroxide (KOH) to etch away defects and smooth the surface, thereby reducing surface recombination and enhancing efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a single etching process is used on the silicon substrate, then the etching speed is high, but the surface defects and cracks remain, causing high recombination loss

Engineering Contradiction:
Improverecombination lossVSAvoidetching speed
Core Design Contradiction:
Loss of energyVSProductivity

Solution Approach 1:

The single etching process is segmented into two sequential etching processes with different etchants and conditions. The first etching process uses a first etchant to remove surface defects and cracks, while the second etching process uses a second etchant to further smooth the surface and reduce recombination loss. This segmentation allows each process to be optimized for its specific function, resolving the contradiction between removing defects and maintaining high productivity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes multiple parameters between the two etching processes, including etchant concentration, temperature, and etching time. The first etching process uses specific parameters optimized for defect removal, while the second process uses different parameters optimized for surface smoothing and recombination loss reduction. This parameter optimization enables both high productivity in the first stage and low recombination loss in the second stage.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the silicon substrate surface is not etched, then the manufacturing process is simple and fast, but the conversion efficiency is low due to surface defects acting as recombination regions

Engineering Contradiction:
Improvesurface qualityVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The etching process is segmented into two distinct steps with different etchants and parameters. The first step addresses surface defects and cracks, while the second step focuses on surface smoothing and recombination loss reduction. This segmentation achieves high surface quality that would be difficult to obtain with a single process, while keeping the overall process complexity manageable through systematic division of tasks.

Inventive Principle:
Principle #1Segmentation

3Loss of energy

If a first etching process is performed to remove surface defects, then the recombination loss is reduced, but the surface may still have imperfections requiring further treatment

Engineering Contradiction:
Improverecombination lossVSAvoidprocessing time
Core Design Contradiction:
Loss of energyVSProductivity

Solution Approach 1:

The patent optimizes parameters for each etching process to achieve complementary effects. The first etching process uses parameters optimized for removing surface defects and cracks, while the second etching process uses different parameters optimized for surface smoothing. This parameter optimization ensures that each process contributes maximally to reducing recombination loss, making the additional processing time necessary and justified by the significant improvement in energy efficiency.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sequential etching process improves minority carrier lifetime and increases solar cell conversion efficiency by effectively removing surface defects and contaminants, leading to higher energy output and reduced manufacturing costs.

Implementation Method 1

A sequential etching process is employed on the silicon substrate, using different concentrations of etchants like potassium hydroxide (KOH) to etch away defects and smooth the surface

Methodology Applied
Scientific EffectChemical etching: Chemical Bonding

Data Source

PatentUS9837259B2Sequential etching treatment for solar cell fabrication
Publication Date: 2017.12.05 MAXEON SOLAR PTE LTD
  • US9837259B2 patent drawing
  • US9837259B2 patent drawing
  • US9837259B2 patent drawing

AI summary

A method of processing a silicon substrate can include etching the silicon substrate with a first etchant having a first concentration and etching with a second etchant having a second concentration. In an embodiment, the second concentration of the second etchant can be greater than the first concentration of the first etchant. In one embodiment, the first etchant can be a different type of etchant than the second etchant. In an embodiment, the first and second etchant can be the same type of etchant. In some embodiments the silicon substrate can be cleaned with a first cleaning solution to remove contaminants from the silicon substrate prior to etching with the first etchant. In an embodiment, the silicon substrate can be cleaned with a second cleaning solution after etching the silicon substrate with a second etchant.