Sequential Laser Beam Steering for Atom Probe Specimen Heating
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Solution Overview
Problem
Pulsed laser atom probe microscopy faces challenges due to uneven specimen heating, which leads to artefacts in the analysis, and existing solutions like simultaneous multi-beam pulsing are cumbersome, costly, and time-consuming, with issues related to beam alignment, interference, and equipment costs.
Innovation Solution
The approach involves sequentially supplying energy beams to multiple sides of the specimen, using a single energy beam source that is split into sub-beams, with only one sub-beam illuminating the specimen at a time, and adjusting the beam steering mirrors to direct sub-beams successively to different sides, allowing for faster scanning and reduced artefacts without the need for multiple energy sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single energy beam source is used with sequential beam input, then equipment cost is reduced and scanning time is shortened, but uneven specimen heating and artefacts occur
Solution Approach 1:
The patent applies periodic action by sequentially switching between multiple energy beam sources in a cyclic manner, where each source illuminates the specimen for a defined time period before switching to the next source. This periodic switching ensures that no single source continuously heats one location, thereby reducing uneven heating and artefacts while using cost-effective single-source equipment
Solution Approach 2:
The patent introduces a temporal dimension to the beam delivery system by implementing sequential activation of energy beam sources at different time intervals. This transforms a spatial problem (multiple simultaneous beams) into a temporal solution (sequential beam delivery), allowing the system to achieve uniform heating without requiring multiple physically present beams at once
2Object-affected harmful factors
If multiple energy beam sources are used simultaneously, then even specimen heating is achieved, but device complexity and cost increase
Solution Approach 1:
The patent merges the functionality of multiple energy beam sources by using a single source that is sequentially activated from different angular positions or configurations. This consolidation achieves the heating uniformity benefit of multiple sources while eliminating the cost and complexity of maintaining multiple independent beam generation systems
Solution Approach 2:
The single energy beam source is designed to perform multiple functions by being repositioned or reconfigured to deliver beams from different angles and positions sequentially. This multi-functional approach replaces the need for dedicated multiple beam sources, reducing equipment cost while maintaining the ability to uniformly heat the specimen through varied illumination angles
3Measurement precision
If beam steering mirrors are used to direct sub-beams, then beam alignment precision is improved, but device complexity increases
Solution Approach 1:
The patent introduces beam steering mirrors as intermediary optical elements that mediate between the energy beam source and the specimen. These mirrors precisely control beam direction and positioning without requiring complex mechanical positioning systems, achieving high alignment precision through optical redirection while maintaining relatively simple device architecture
Solution Approach 2:
The patent replaces complex mechanical positioning systems with optical beam steering mirrors that use reflective principles to achieve precise beam alignment. This substitution eliminates the need for mechanically repositioning the entire beam source or detector assemblies, reducing device complexity while maintaining or improving alignment precision through optical control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method significantly reduces the time required for scanning and alignment, minimizes artefacts, and lowers equipment costs by using a single energy source and sequential beam input, enabling faster and more efficient atom probe analysis.
Implementation Method 1
A pulsed laser atom probe (PLAP) microscope is an atom probe which uses a laser beam to trigger ionization
Implementation Method 2
a positive electrical charge (e.g., a baseline voltage) is applied to the specimen such that the electrostatic field near the apex of the specimen
Implementation Method 3
A beam splitter is provided to receive a laser beam from the laser beam source along a beam path, and to split the laser beam into sub-beams which travel along different sub-beam paths
Data Source
AI summary
An atom probe directs two or more pulsed laser beams onto a specimen, with each laser beam being on a different side of the specimen, and with each laser beam supplying pulses at a time different from the other laser beams. The laser beams are preferably generated by splitting a single beam provided by a laser source. The laser beams are preferably successively aligned incident with the specimen by one or more beam steering mirrors, which may also scan each laser beam over the specimen to achieve a desired degree of specimen ionization.