High-Speed Serial Data Transfer for Semiconductor Inspection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional semiconductor inspection systems face limitations in maximizing inspection speed, reliability, and scalability due to restricted data transfer rates, signal integrity issues, and the lack of scalability in internal processing nodes within the inspection tool.
Innovation Solution
The system employs high-speed serial data transfer methods using fibre channels with optical transmission media, such as fiber optic cables, to transfer image data outside the inspection tool, allowing for external processing nodes to analyze the data, thereby overcoming space, power, and scalability constraints.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If parallel data transfer methods are used within the inspection tool, then data can be transferred to internal processing nodes, but data transfer speed is limited and signal integrity issues occur
Solution Approach 1:
The patent replaces the mechanical/electrical parallel data transfer system with an optical serial data transfer system using fiber optic cables. This substitution enables higher data transfer speeds while maintaining signal integrity over longer distances, as optical signals are less susceptible to interference and attenuation compared to electrical signals.
Solution Approach 2:
The patent inverts the conventional approach by using serial data transfer instead of parallel data transfer. This inversion allows for higher speeds and better signal integrity, as serial transfer over optical media avoids the bottlenecks and interference issues inherent in parallel electrical transfer systems.
2Adaptability or versatility
If processing nodes are located inside the inspection tool, then data can be processed in real-time, but space and scalability are constrained
Solution Approach 1:
The patent extracts the processing nodes from the inspection tool and relocates them to external locations. This extraction removes the space constraints within the inspection tool while maintaining real-time processing capabilities through high-speed optical data transfer. The processing nodes can be positioned in remote server rooms or data centers, enabling unlimited scalability.
Solution Approach 2:
The patent transitions from a spatially constrained internal processing architecture to a distributed external processing architecture. By moving processing nodes to external dimensions (different physical locations connected via optical fibers), the system achieves scalability without being limited by the internal space of the inspection tool.
3Productivity
If high data transfer rates are implemented, then inspection speed improves, but system complexity increases
Solution Approach 1:
The patent introduces optical fiber cables as an intermediary medium for data transfer. This intermediary enables high-speed data transmission while simplifying the overall system architecture compared to complex parallel electrical transfer systems. The optical intermediary handles the high bandwidth requirements without requiring complex routing, switching, or synchronization infrastructure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances data transfer speed, improves signal integrity, and increases scalability by performing a majority of the data processing outside the inspection tool, enabling accurate defect detection and efficient image analysis.
Implementation Method 1
one or more optical transceivers for converting each encoded data packet into an optical signal that can be transmitted serially over one or more fibre channels
Data Source
AI summary
An inspection system and method for serial high-speed image data transfer is provided herein. According to one embodiment, the method may include receiving multiple channels of image data at an input data rate and buffering the image data at the input data rate until the buffered data reaches a predetermined size. Once the predetermined size has been reached, the method may include packing the buffered data, encoding the data packet, serializing the encoded data packet and converting the encoded data packet into an optical signal. In some cases, the image data may be packed along with a data header containing information about the system. Once converted, each optical signal (i.e., representing one data packet) may be transmitted serially over one or more fibre channels to a processing node of the inspection system. In most cases, the data is packed, encoded, serialized and transmitted to the processing node at a data rate much higher than the input data rate. The processing node analyzes the optical signal to detect defects on a specimen under inspection.