Series Flow-Rate Regulator for Super-Low Chemical Liquid Precision
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Solution Overview
Problem
Existing liquid processing systems face challenges in accurately controlling super-low flow rates of chemical liquids, particularly in semiconductor manufacturing, where precise concentration control is crucial for substrate processing, and existing solutions often result in inconsistent chemical liquid concentrations due to variations in pressure and flow rate control.
Innovation Solution
A flow-rate regulator device comprising a first and second flow-rate regulator component positioned in series on the chemical-liquid line, where the first component adjusts the flow rate to be several times greater than the target when the second is fully open, and the second component fine-tunes the flow rate to the target level, ensuring accurate control of super-low flow rates and concentrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single flow-rate regulator component is used to control super-low flow rates, then the device complexity is low, but the flow rate control precision deteriorates due to inability to achieve accurate super-low flow rate control
Solution Approach 1:
The flow-rate regulator device is divided into a first flow-rate regulator component and a second flow-rate regulator component connected in series. The first component handles coarse flow rate adjustment while the second component handles fine adjustment, enabling precise super-low flow rate control through segmented functional responsibilities.
2Measurement precision
If multiple flow-rate regulator components are connected in series to improve flow rate control precision, then the flow rate control precision improves, but the device complexity increases
Solution Approach 1:
The regulator system is segmented into two components with distinct functional roles: the first component for coarse adjustment and the second for fine adjustment. This segmentation allows achieving high precision without excessive complexity by assigning specific tasks to each component.
Solution Approach 2:
The first flow-rate regulator component intentionally sets the flow rate to a value several times greater than the target flow rate when the second component is fully open. This partial action approach allows the second component to focus on fine-tuning, achieving precise control through divided functional effort.
3Measurement precision
If chemical liquid is diluted multiple times through multiple tanks and mixing devices, then the concentration control precision improves, but the device complexity and loss of substance increase
Solution Approach 1:
The flow rate of chemical liquid is pre-adjusted to a value several times greater than the target flow rate using the first flow-rate regulator component before entering the mixing device. This preliminary action ensures that the chemical liquid flows at an optimized rate into the mixing device, reducing the need for multiple dilution stages and minimizing chemical liquid loss while maintaining concentration precision.
Data Source
AI summary
A flow-rate regulator device for controlling a flow rate of a liquid includes a first flow-rate regulator component positioned on an upstream side of a liquid line, and a second flow-rate regulator component positioned on a downstream side of the liquid line and connected in series to the first flow-rate regulator component. The first flow-rate regulator component adjusts a degree of opening such that a flow rate of liquid flowing through the liquid line is set a specified number of times greater than a target flow rate when the second flow-rate regulator component has a full opening, and the second flow-rate regulator component adjusts a degree of opening such that the flow rate of the liquid flowing through the liquid line is to be at the target flow rate when the first flow-rate regulator component is adjusted to have the degree of opening.