Series Pneumatic Vibration Isolator for Lithography Saturation

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Solution Overview

Problem

Conventional vibration isolators in lithographic apparatuses, such as pneumatic isolators, face limitations in reducing vibrations due to isolation saturation, which affects the accuracy and performance of the apparatus, particularly in high-stringency applications like integrated circuit manufacturing.

Innovation Solution

A vibration isolator configuration comprising a base, a coupling element, a decoupling mass, a first pneumatic isolator part between the base and the decoupling mass, and a second pneumatic isolator part between the decoupling mass and the coupling element, enhancing vibration isolation by decoupling at a frequency corresponding to the sum of the static spring stiffness of both isolator parts, thereby improving performance beyond the limitations of single pneumatic isolators.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single pneumatic isolator is used, then the structure is simple, but the vibration isolation performance is limited due to isolation saturation

Engineering Contradiction:

Improvevibration isolation performanceVSAvoidisolator structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The vibration isolator is divided into two separate pneumatic isolator parts arranged in series, with each part providing independent vibration isolation. This segmentation allows the system to achieve better overall isolation performance by cascading the isolation effects of multiple isolators, thereby resolving the contradiction between improved reliability and device complexity.

Inventive Principle:

Principle #1Segmentation

2Reliability

If the decoupling frequency is increased, then the vibration isolation effectiveness is improved, but the static spring stiffness must be increased which may affect other system parameters

Engineering Contradiction:

Improvevibration isolation effectivenessVSAvoidstatic spring stiffness

Core Design Contradiction:

ReliabilityVSForce

Solution Approach 1:

Instead of increasing the stiffness of a single isolator, the patent introduces a new dimension by adding a second isolator part in series. This dimensional expansion allows the system to achieve higher decoupling frequency and better vibration isolation effectiveness without excessively increasing the static spring stiffness of individual components, thus resolving the contradiction between reliability improvement and force parameter constraints.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces vibration transmission, leading to improved isolation performance by avoiding isolation saturation and increasing the decoupling frequency, thus enhancing the accuracy and reliability of the lithographic apparatus.

Implementation Method 1

at least one of the first and second vibration isolator part comprises a pneumatic isolator

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS10816910B2Vibration isolator, lithographic apparatus and device manufacturing method

Publication Date: 2020.10.27 ASML NETHERLANDS BV

AI summary

The invention relates to a vibration isolator, comprising:a base;a coupling element to be coupled to a vibration sensitive object;a decoupling mass;a first vibration isolator part arranged between the base and the decoupling mass; anda second vibration isolator part arranged between the decoupling mass and the coupling element,and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.