SERS Element Nanogap Stability via Segmented Conductor Layer

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Solution Overview

Problem

Conventional surface-enhanced Raman scattering elements with nanogaps face challenges in maintaining the intensity of surface-enhanced Raman scattering and stability of the minute metal structure, particularly in terms of peeling and thermal deformation.

Innovation Solution

A surface-enhanced Raman scattering element with a substrate and a conductor layer featuring periodically arranged pillars and protrusions, where the base part has a thickness greater than the projections, forming gaps that act as nanogaps to enhance electric fields and stabilize the structure, and a method involving vapor deposition to form the conductor layer with controlled thickness and gap geometry.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a nanogap structure is formed with projections to enhance electric fields, then surface-enhanced Raman scattering intensity increases, but the structure becomes prone to peeling and thermal deformation

Engineering Contradiction:
Improvesurface-enhanced Raman scattering intensityVSAvoidstructural stability
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The conductor layer is segmented into a base part and multiple protrusions, where the base part remains in contact with the substrate while protrusions form nanogaps. This segmentation allows the structure to maintain both the nanogap configuration for SERS enhancement and sufficient contact area for structural stability, preventing peeling and thermal deformation.

Inventive Principle:
Principle #1Segmentation

2Illumination intensity

If the conductor layer is made thin to form nanogaps, then electric field enhancement is improved, but the layer becomes unstable and prone to peeling

Engineering Contradiction:
Improveelectric field enhancementVSAvoidadhesion strength
Core Design Contradiction:
Illumination intensityVSStrength

Solution Approach 1:

Different regions of the conductor layer are given different functions: the base part provides adhesion and structural support by maintaining contact with the substrate, while the protrusions create localized nanogaps for electric field enhancement. This local differentiation of quality allows simultaneous optimization of both adhesion strength and SERS performance.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution increases the intensity of surface-enhanced Raman scattering by creating stable nanogaps that are resistant to thermal deformations and peeling, allowing for enhanced electric field enhancement and improved Raman scattering intensity.

Implementation Method 1

surface-enhanced Raman scattering occurs, whereby Raman scattering light enhanced by about 10^8

Methodology Applied
Scientific EffectSurface-enhanced Raman scattering:

Implementation Method 2

electric fields are locally enhanced upon irradiation with excitation light, whereby the intensity of surface-enhanced Raman scattering increases

Methodology Applied
Scientific EffectLocalized surface plasmon resonance:

Implementation Method 3

the conductor layer is formed by vapor deposition such that the base part has a thickness greater than a height of the projections

Methodology Applied
Scientific EffectVapor deposition: Physical Vapour Deposition

Data Source

PatentEP2884264B1Surface-enhanced raman scattering element, and method for producing same
Publication Date: 2019.11.20 HAMAMATSU PHOTONICS KK
  • EP2884264B1 patent drawingFigure 1
  • EP2884264B1 patent drawingFigure 2
  • EP2884264B1 patent drawingFigure 3

AI summary

A SERS element 2 comprises a substrate 21 having a front face 21 a; a fine structure part 24 formed on the front face 21a and having a plurality of pillars 27; and a conductor layer 23 formed on the fine structure part 24 and constituting an optical function part 20 for generating surface-enhanced Raman scattering. The conductor layer 23 has a base part 28 formed along the front face 21 a and a plurality of protrusions 29 protruding from the base part 28 at respective positions corresponding to the pillars 27. The base part 28 has a thickness greater than the height of the pillars 27.