SERS Element Nanogap Formation via Recessed Pillar Grooves

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Solution Overview

Problem

Current surface-enhanced Raman scattering elements do not effectively increase the intensity of surface-enhanced Raman scattering using nanogaps, which are crucial for local electrical field enhancement and enhanced Raman scattering.

Innovation Solution

A surface-enhanced Raman scattering element is designed with a substrate featuring a fine structure portion having projections or depressions with recessed regions, where a conductor layer is formed to create gaps that function as nanogaps, enhancing the local electrical field and increasing the intensity of surface-enhanced Raman scattering. The conductor layer is deposited using vapor phase growth, ensuring that at least a portion of the inner surface of the recessed regions is exposed to form these nanogaps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a conductor layer is formed to completely cover the fine structure portion, then the continuity and coverage of the conductor layer is improved, but the formation of nanogaps is hindered and SERS intensity is reduced

Engineering Contradiction:
Improvecontinuity of conductor layerVSAvoidnanogap formation precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The recessed regions are formed on the fine structure portion before depositing the conductor layer. This preliminary action creates predetermined spaces where the conductor layer cannot fully cover, ensuring nanogap formation is achieved before the deposition process begins, thus resolving the contradiction between continuous coverage and nanogap formation

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The conductor layer is designed to have different coverage characteristics in different regions: it fully covers the outer surfaces of the fine structure portion while intentionally leaving the recessed regions partially or fully exposed. This local differentiation allows the conductor layer to maintain overall continuity while creating localized nanogaps for enhanced SERS activity

Inventive Principle:
Principle #3Local quality

2Reliability

If the conductor layer thickness is increased, then the electrical conductivity is improved, but the nanogap dimensions are reduced and SERS enhancement is diminished

Engineering Contradiction:
Improveelectrical conductivityVSAvoidnanogap dimension
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

The recessed regions are created before conductor layer deposition, establishing fixed spatial boundaries that limit the maximum thickness of the conductor layer in those areas. This preliminary structuring ensures that even as the conductor layer thickness increases on outer surfaces, the nanogap dimensions within recessed regions remain controlled and optimized for SERS enhancement

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The design allows different effective thicknesses of the conductor layer in different regions: thicker on outer surfaces for electrical conductivity and continuity, and thinner or discontinuous within recessed regions to maintain optimal nanogap dimensions. This parameter differentiation resolves the contradiction between conductivity and nanogap size

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If a simple flat conductor layer is used, then the manufacturing process is simplified, but the local electrical field enhancement is insufficient and SERS intensity is low

Engineering Contradiction:
Improveconductor layer fabricationVSAvoidlocal electrical field enhancement
Core Design Contradiction:
Ease of manufactureVSIllumination intensity

Solution Approach 1:

The fine structure portion is segmented into multiple regions with different conductor layer coverage: outer surfaces that are fully covered and recessed regions that are partially or fully exposed. This segmentation creates multiple nanogap locations across the structure, providing numerous sites for local electrical field enhancement while maintaining a relatively simple overall manufacturing process

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The conductor layer is designed with local quality variations where recessed regions have different coverage characteristics compared to outer surfaces. This local differentiation creates concentrated electrical field enhancement zones within the recessed regions while keeping the overall manufacturing approach straightforward and scalable

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The described configuration significantly increases the intensity of surface-enhanced Raman scattering by creating effective nanogaps, allowing for stable and enhanced Raman scattering, as demonstrated by the formation of gaps in the conductor layer corresponding to the recessed regions and base end portions of the projections or depressions.

Implementation Method 1

a conductor layer is formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering

Methodology Applied
Scientific EffectVapor phase growth: Physical Vapour Deposition

Implementation Method 2

if a so-called nanogap is formed in a fine metal structure, local electrical field enhancement occurs when excitation light is irradiated, and the intensity of surface-enhanced Raman scattering is increased

Methodology Applied
Scientific EffectLocal electrical field enhancement: Electric Field

Data Source

PatentUS10393663B2Surface-enhanced raman scattering element and method for manufacturing same
Publication Date: 2019.08.27 HAMAMATSU PHOTONICS KK
  • US10393663B2 patent drawing
  • US10393663B2 patent drawing
  • US10393663B2 patent drawing

AI summary

An SERS element includes a substrate, a fine structure portion formed on a surface of the substrate and having a plurality of pillars, and a conductor layer formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering. A groove is provided in an outer surface of each pillar. A plurality of gaps are formed in the conductor layer by forming the conductor layer on the outer surface of each pillar in a state in which at least a portion of an inner surface of the groove is exposed.