SERS Sensor Nanostructured Surface Ion Beam Fabrication

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional SERS sensors face challenges with low throughput, limited size, and instability in manufacturing due to the difficulties in forming large-area nanostructured surfaces using methods like nanosphere lithography and anodic aluminum oxide templates.

Innovation Solution

A method involving the irradiation of a silicon wafer with oblique nitrogen ion beams to form a quasi-periodic, anisotropic array of elongated ridge elements with a wave-ordered structure, followed by etching to create a nanostructured surface, which is then coated with metal elements for enhanced Raman scattering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If nanosphere lithography or AAO template methods are used to form nanostructured surfaces, then the nanostructure can be created, but the manufacturing throughput is low and large-area substrates cannot be formed

Engineering Contradiction:

Improvesubstrate areaVSAvoidmanufacturing throughput

Core Design Contradiction:

Area of stationary objectVSProductivity

Solution Approach 1:

The substrate is divided into multiple separate substrates that are processed independently and then assembled together to form a large-area sensor array, enabling both high throughput processing of individual substrates and creation of large total sensing area

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple substrates are assembled into a stacked configuration where substrates are positioned at different heights and angles, allowing light to pass through multiple sensing layers and enabling large total sensing area without requiring a single large substrate

Inventive Principle:

Principle #7Nested doll (Nesting)

2Quantity of substance

If conventional nanosphere lithography is used, then nanostructures can be formed, but the surface density of nanospheres and metal triangles is low and array sizes are limited to a few millimeters

Engineering Contradiction:

Improvesurface density of nanospheresVSAvoidarray size

Core Design Contradiction:

Quantity of substanceVSArea of stationary object

Solution Approach 1:

Different regions of the substrate are engineered with different nanostructure densities and configurations optimized for specific functions, allowing high surface density in critical sensing areas while maintaining overall large substrate area

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The sensing structure is extended into the third dimension by stacking multiple substrates at different angles and heights, creating a three-dimensional array that dramatically increases total sensing capacity beyond what planar two-dimensional arrays can achieve

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Reliability

If AAO template methods are used, then nanopores can be formed, but the process stability is poor due to sensitivity to small deviations in critical parameters

Engineering Contradiction:

Improveprocess stabilityVSAvoidnanopore formation precision

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The nanostructures are formed through self-assembly processes and self-aligned deposition techniques that automatically correct minor variations in processing parameters, making the manufacturing process inherently more robust and less sensitive to parameter deviations

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Surface preparation and initial layer deposition are carefully engineered to create a foundation that guides subsequent nanostructure formation, ensuring consistent results even when processing parameters vary slightly

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the creation of larger, more stable nanostructured surfaces for SERS sensors, significantly increasing the size of the nanostructured area up to 300 mm, improving manufacturing reproducibility, and enhancing the sensitivity for detecting organic compounds.

Implementation Method 1

irradiating a surface of a wafer with a first oblique beam of nitrogen ions

Methodology Applied

Scientific EffectIon implantation: Ion Implantation

Implementation Method 2

irradiating a surface of a wafer with a first oblique beam of nitrogen ions to form a primary nanomask

Methodology Applied

Scientific EffectSputtering: Sputtering

Implementation Method 3

etching the surface of the wafer with the primary nanomask to generate a nanostructured surface

Methodology Applied

Scientific EffectEtching:

Implementation Method 4

depositing metal elements over the nanostructured surface

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 5

optical sensors for detecting and measuring the traces of organic compounds by the method of Raman spectroscopy using the effect of surface enhanced Raman scattering (SERS)

Methodology Applied

Scientific EffectSurface enhanced Raman scattering:

Data Source

PatentUS9057704B2SERS-sensor with nanostructured surface and methods of making and using

Publication Date: 2015.06.16 WOSTEC

AI summary

A surface enhanced Raman scattering (SERS) sensor includes a substrate with a nanostructured surface. The nanostructured surface has a quasi-periodic, anisotropic array of elongated ridge elements having a wave-ordered structure pattern, each ridge element having a wavelike cross-section and oriented substantially in a first direction. The sensor also includes a plurality of metal elements disposed, at least in part, on tops of the ridge elements.