Server Fault Detection Using Product Wafer Number Filtering
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Solution Overview
Problem
Conventional group management systems for semiconductor manufacturing apparatuses fail to accurately detect faults due to high non-uniformity in measurement information when using the total number of wafers, including dummy wafers, as a key, leading to wide threshold values and inaccurate fault detection.
Innovation Solution
A server device within the group management system stores time sequential measurement information and includes a fault detection unit that filters data using the number of product wafers as a key, allowing for precise fault detection by composing output information based on product wafer number conditions and condition information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the total number of wafers including dummy wafers is used as a key for fault detection, then all measurement information is covered, but the non-uniformity of measurement information increases and fault detection accuracy decreases
Solution Approach 1:
The patent segments the total wafer quantity into two distinct components: product wafer number (for actual manufactured wafers) and dummy wafer number (for placeholder wafers). This segmentation allows the system to use product wafer number as the key for fault detection, thereby excluding dummy wafers from the calculation and reducing non-uniformity in measurement information while maintaining comprehensive coverage of relevant data.
2Quantity of substance
If the total number of wafers including dummy wafers is used as a key, then complete data set is analyzed, but wide threshold values are needed and fault detection becomes less accurate
Solution Approach 1:
The patent extracts and separates dummy wafers from the total wafer count, using only the product wafer number as the key for fault detection. This extraction removes the interfering element (dummy wafers) that causes non-uniformity, allowing for narrower and more precise threshold values while maintaining analysis of the complete relevant data set.
3Quantity of substance
If dummy wafers are included in wafer count, then gas flow resistance varies due to wiring differences, but fault detection cannot distinguish between normal and abnormal variations
Solution Approach 1:
The patent applies local quality by treating product wafers and dummy wafers differently in the fault detection process. Specifically, it assigns different characteristics to these two types: product wafers have wiring patterns that affect gas flow resistance, while dummy wafers do not. By using product wafer number as the key, the system locally optimizes the detection approach for actual product wafers, enabling accurate discrimination between normal and abnormal variations in gas flow resistance.
Data Source
AI summary
It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unit.