Service Module Referencing for EUV Lithography Maintenance

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Solution Overview

Problem

Projection exposure apparatuses, particularly those in the EUV range, face challenges in maintaining complex mechatronic systems and sensitive optical elements, leading to potential faults and degradation over time, which complicates maintenance and component exchange.

Innovation Solution

A method involving a service module that attaches to the projection exposure apparatus, references a reference element, and allows for simplified maintenance measures, such as contamination examination, optical surface cleaning, and non-destructive material testing, while avoiding collisions with sensitive components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a service module is attached to the projection exposure apparatus for maintenance, then maintenance accessibility is improved, but the risk of collision with sensitive optical elements increases

Engineering Contradiction:

Improvemaintenance accessibilityVSAvoidcollision risk with optical elements

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

A reference element is introduced as an intermediary between the service module and the projection exposure apparatus. The service module references its position and movement to this reference element, which provides a safe coordinate system for operation. This intermediary enables maintenance access while preventing direct interaction that could cause collision with sensitive optical elements.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The service module continuously references the reference element during maintenance operations to obtain feedback on its position and orientation. This feedback mechanism allows the service module to adjust its movements in real-time, maintaining a safe distance from sensitive optical elements while still accessing components for maintenance.

Inventive Principle:

Principle #23Feedback

2Ease of repair

If modules are made accessible for inspection by removing them, then maintenance capability is improved, but system complexity and disassembly requirements increase

Engineering Contradiction:

Improvemaintenance capabilityVSAvoiddisassembly requirements

Core Design Contradiction:

Ease of repairVSDevice complexity

Solution Approach 1:

The service module is extracted as a separate, removable unit that can be attached to the projection exposure apparatus only when maintenance is needed. This extraction principle allows maintenance capabilities to be added without permanently increasing system complexity, as the service module can be removed and stored when not in use.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The maintenance system transitions from a static configuration requiring permanent disassembly to a dynamic configuration where the service module can be attached and detached as needed. This dynamic approach allows the system to adapt between operational and maintenance states, reducing overall complexity by only introducing additional components when required.

Inventive Principle:

Principle #15Dynamics

3Reliability

If the service module is precisely positioned to avoid collisions, then component safety is improved, but positioning time and complexity increase

Engineering Contradiction:

Improvecomponent safetyVSAvoidpositioning time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The reference element is pre-positioned and pre-calibrated within the projection exposure apparatus before the service module is attached. This preliminary action establishes a known, safe coordinate system that the service module can reference immediately upon attachment, eliminating the need for time-consuming positioning calculations and safety checks during each maintenance operation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Complex mechanical positioning systems and collision avoidance calculations are replaced by a referencing system based on the pre-established reference element. The service module determines its position through reference to this element rather than through complex mechanical sensing and calculation, significantly reducing positioning time while maintaining high component safety.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12332576B2Method for maintaining a projection exposure apparatus, service module and arrangement for semiconductor lithography

Publication Date: 2025.06.17 CARL ZEISS SMT GMBH

AI summary

A method for maintaining a projection exposure apparatus comprising at least two modules and a reference element, wherein the modules are referenced to the reference element, comprises: removing a module; attaching a service module to or in the vicinity of the projection exposure apparatus; referencing the service module to the reference element of the projection exposure apparatus; and implementing a maintenance measure with the aid of the service module.