Servo Belt Scanner for GCIB Workpiece Positioning
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Solution Overview
Problem
The existing gravity-assisted workpiece scanning mechanism for gas cluster ion beams has limitations, including restricted slow-scan movement direction and susceptibility to contamination and jamming, which can lead to incorrect processing or equipment failure.
Innovation Solution
A scanning apparatus with a slow-scan mechanism using a shuttle drive assembly, pulleys, and a geared belt system, actuated by a servo motor, allows for linear movement of the workpiece through a gas cluster ion beam, enabling more flexible and reliable scanning across the workpiece.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If gravity-assisted slow-scan movement is used, then the structure is simple, but the movement direction is restricted and contamination/jamming risk increases
Solution Approach 1:
The patent replaces the gravity-based mechanical system with a servo motor-driven belt system. The servo motor controls the belt to move the workpiece in precise linear paths, eliminating dependence on gravity and enabling controlled movement in any direction within the processing chamber.
Solution Approach 2:
The patent uses a belt-driven mechanism actuated by a servo motor, which can be considered a form of controlled mechanical transmission system. This allows for precise control of workpiece movement without relying on gravitational forces, enabling flexible positioning and scanning patterns.
2Device complexity
If gravity-assisted slow-scan movement is used, then the structure is simple, but reliability decreases due to contamination and jamming
Solution Approach 1:
The gravity-dependent mechanical system is replaced with a servo-controlled belt system. The servo motor provides active control and feedback, preventing jamming and ensuring reliable operation. The belt system is designed to minimize contamination risks compared to open gravity-assisted mechanisms.
Solution Approach 2:
The servo motor incorporates feedback control to monitor and adjust the position and movement of the workpiece. This ensures accurate tracking of the scanning path and prevents errors that could lead to processing defects or equipment failure.
3Use of energy by moving object
If gravity-assisted movement is used, then energy consumption is low, but scanning flexibility and coverage are limited
Solution Approach 1:
The passive gravity-based system is replaced with an active servo motor system. While servo motors consume more energy than gravity, they provide precise control over movement speed, position, and direction, enabling comprehensive scanning coverage and flexible scanning patterns that gravity alone cannot achieve.
Solution Approach 2:
The system transitions from static gravity-dependent movement to dynamic servo-controlled movement. The servo motor can adjust speed, acceleration, and position in real-time, enabling adaptive scanning patterns that optimize both energy consumption and scanning coverage based on process requirements.
Data Source
AI summary
Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.