Substrate Process Setting Display With Validity-Based File Editing
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Solution Overview
Problem
Existing display processing apparatuses lack an efficient method to identify valid setting items during file editing operations, making it difficult for operators to determine which settings are valid and which are not.
Innovation Solution
A technique that includes a memory to store files with categorized items, setting values, and validity information, a display to show validity and setting values for each category on a screen, and a manipulator to edit the displayed information, allowing easy identification and editing of valid settings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If file editing operation is performed without validity information display, then the interface is simpler, but operators cannot easily identify valid setting items
Solution Approach 1:
The patent applies color coding to visually distinguish valid and invalid setting items. Valid items are displayed in a first color (e.g., green or blue) while invalid items are displayed in a second color (e.g., red or gray). This color change principle allows operators to immediately identify which setting items are valid without adding complex interface elements, thus resolving the contradiction between information visibility and interface simplicity.
2Loss of information
If all setting items are displayed without categorization, then the display is more compact, but operators have difficulty identifying valid setting items
Solution Approach 1:
The patent segments the display into multiple categories, with each category containing relevant setting items grouped together. This segmentation allows operators to navigate through organized groups rather than viewing all items in a single undifferentiated list. The categorization structure helps operators quickly locate valid setting items within specific functional categories, resolving the contradiction between information organization and identification ease.
3Reliability
If validity information is not displayed, then the editing operation is faster, but error prevention capability is reduced
Solution Approach 1:
The patent performs preliminary action by pre-calculating and displaying validity information for all setting items before the operator completes the editing operation. The system determines which items are valid based on predefined criteria and displays this information in advance, allowing operators to make informed decisions without time-consuming trial and error. This preliminary validation display resolves the contradiction between error prevention and operation speed.
Data Source
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AI summary
There is provided a technique capable of easily identifying information related to a valid setting item used in a substrate processing apparatus when performing a file editing in a display processing apparatus. There is provided a technique that includes: a memory configured to store a file containing a plurality of items for each of a plurality of categories, setting values for each of the plurality of items and validity information indicating whether the setting values for each of the plurality of items are valid, wherein process conditions for a substrate are classified into the plurality of categories; a display configured to display the validity information and the setting values for each of the plurality of items classified for each of the plurality of categories on a screen for each of the categories; and a manipulator configured to perform an edit operation on the validity information displayed on the screen.