Shack-Hartmann Sensor Wavefront Precision via Spot Segmentation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Shack-Hartmann sensors face a drop in wavefront measuring precision due to steep local wavefront slopes and large slope variations, leading to reduced center-of-gravity position detecting precision and increased crosstalk in large wavefront aberration measurements.

Innovation Solution

A wavefront measuring method using a Shack-Hartmann sensor with a micro lens array and light receiving elements, where the center-of-gravity position is provisionally determined, and areas are set to calculate the distance between adjacent positions, reducing overlap and enabling precise wavefront calculation by adjusting the detection area based on the distance between center-of-gravity positions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the Shack-Hartmann sensor measures large wavefront aberration with steep local wavefront slopes, then the dynamic range is enlarged, but the distance between CoG positions of spots reduces and measuring precision drops

Engineering Contradiction:
Improvedynamic rangeVSAvoidwavefront measuring precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent segments the spot detection process by dividing the detection area into multiple regions and calculating CoG positions for each region separately. This segmentation allows the system to maintain precision even when spots overlap by analyzing local intensity distributions in divided areas, thereby resolving the contradiction between enlarged dynamic range and maintained measuring precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary characterization of light transmission through each micro lens and establishes correlation between micro lenses and spots before measurement. This preliminary action creates a reference framework that enables accurate wavefront reconstruction even when spot positions shift significantly, allowing the system to handle large wavefront aberrations while maintaining precision.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If the local wavefront slope is steep, then the wavefront aberration dynamic range increases, but the CoG position detecting precision lowers due to reduced distance between spots

Engineering Contradiction:
Improvewavefront aberration measurement capabilityVSAvoidCoG position detecting precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent applies local quality by analyzing intensity distributions in locally divided areas rather than treating each spot as a single entity. By examining the intensity profile within segmented regions and calculating CoG positions for each segment, the system maintains detecting precision even when spots overlap due to steep wavefront slopes, thus resolving the contradiction between extended measurement capability and preserved precision.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If the distance between CoG positions of spots reduces, then the dynamic range is enlarged, but crosstalk increases and measuring precision drops

Engineering Contradiction:
Improvemeasurement dynamic rangeVSAvoidmeasurement reliability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent segments the intensity distribution analysis into multiple local areas, calculating CoG positions for each segment rather than treating overlapping spots as a single entity. This segmentation approach isolates the contribution of each micro lens to specific regions, reducing crosstalk between adjacent spots and maintaining measurement reliability even when the distance between CoG positions is reduced to expand dynamic range.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method maintains wavefront measuring precision by reducing crosstalk and dynamic range issues, allowing for accurate wavefront calculations even in cases of steep slope variations.

Implementation Method 1

a plurality of micro lenses configured to condense light that has passed the target optical system upon the light receiving elements

Methodology Applied
Scientific EffectLight condensation: Lens

Implementation Method 2

the 'spot' has an intensity distribution of light that is condensed on the light receiving sensor by each micro lens. A center-of-gravity ('CoG') position of the spot shifts due to a wavefront slope incident upon the micro lens array when the light is condensed

Methodology Applied
Scientific EffectWavefront slope detection:

Data Source

PatentUS8891077B2Shack-Hartmann sensor and wavefront measuring method utilizing the same
Publication Date: 2014.11.18 CANON KK
  • US8891077B2 patent drawing
  • US8891077B2 patent drawing
  • US8891077B2 patent drawing

AI summary

A wavefront measuring method using a Shack-Hartmann sensor includes the steps of provisionally determining one of a plurality of light receiving elements as a center-of-gravity position in a spot having a light intensity distribution of light condensed on the light receiving element, calculating a distance between the provisionally determined center-of-gravity position and an adjacent center-of-gravity position, setting an area smaller than and inside of a spot that partially overlaps another spot, and setting a spot that does not overlap another spot to the area, calculating a center-of-gravity position for each area, and calculating the wavefront based upon a shift amount between an ideal center-of-gravity position when parallel light enters the micro lens array and the center-of-gravity position of each area.